Inventor
FUJIHARA JUN
JP23 patents
⚠️ This page may combine multiple inventors who share the name “FUJIHARA JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
21 patentsUS11249132B2Feb 15, 2022
Prober and method of preheating probe card
TOKYO ELECTRON LTD2 citations72
US11199575B2Dec 14, 2021
Prober and probe card precooling method
TOKYO ELECTRON LTD2 citations72
US11307223B2Apr 19, 2022
Inspection device and method of controlling temperature of probe card
TOKYO ELECTRON LTD0 citations62
US11385283B2Jul 12, 2022
Chuck top, inspection apparatus, and chuck top recovery method
TOKYO ELECTRON LTD0 citations61
US11215640B2Jan 4, 2022
Prober and probe card cleaning method
TOKYO ELECTRON LTD0 citations61
US11099236B2Aug 24, 2021
Inspection device and contact method
TOKYO ELECTRON LTD1 citations61
US11067624B2Jul 20, 2021
Inspection system
TOKYO ELECTRON LTD1 citations56
US11454664B2Sep 27, 2022
Testing system
TOKYO ELECTRON LTD0 citations54
US12065182B2Aug 20, 2024
Trolley and method for supporting component of substrate processing apparatus
TOKYO ELECTRON LTD0 citations52
US11525859B2Dec 13, 2022
Insertion/extraction mechanism and method for replacing block member
TOKYO ELECTRON LTD0 citations52
US11761704B2Sep 19, 2023
Inspection apparatus and inspection method
TOKYO ELECTRON LTD0 citations51
US11269004B2Mar 8, 2022
Inspection apparatus and inspection method for inspecting electrical characteristic of electronic device
TOKYO ELECTRON LTD0 citations51
US11169206B2Nov 9, 2021
Inspection apparatus, inspection system, and aligning method
TOKYO ELECTRON LTD0 citations51
US11092641B2Aug 17, 2021
Inspection apparatus and inspection method
TOKYO ELECTRON LTD0 citations51
US10935570B2Mar 2, 2021
Intermediate connection member and inspection apparatus
TOKYO ELECTRON LTD0 citations51
US10901028B2Jan 26, 2021
Substrate inspection method and substrate inspection device
TOKYO ELECTRON LTD0 citations51
US10845409B2Nov 24, 2020
Substrate inspection device
TOKYO ELECTRON LTD0 citations51
US12523618B2Jan 13, 2026
Inspection system
TOKYO ELECTRON LTD0 citations50
US11467208B2Oct 11, 2022
Contact release method in inspection apparatus and inspection apparatus
TOKYO ELECTRON LTD0 citations50
US11442096B2Sep 13, 2022
Testing apparatus
TOKYO ELECTRON LTD0 citations50
US11360115B2Jun 14, 2022
Inspection system
TOKYO ELECTRON LTD0 citations47