Inventor
YOO HOSUN
KR6 patents
Patents
6 patentsUS12119210B2Oct 15, 2024
Fastening automation apparatus for upper electrode
SAMSUNG ELECTRONICS CO LTD0 citations60
US12020909B2Jun 25, 2024
Plasma processing apparatus and plasma processing method
SAMSUNG ELECTRONICS CO LTD0 citations58
US11646179B2May 9, 2023
Plasma processing apparatus and plasma processing method
SAMSUNG ELECTRONICS CO LTD0 citations58
US12562357B2Feb 24, 2026
Apparatus for monitoring a plasma process
SAMSUNG ELECTRONICS CO LTD0 citations56
US12170233B2Dec 17, 2024
Plasma treatment apparatus, a method of monitoring a process of manufacturing a semiconductor device by using the same, and a method of manufacturing a semiconductor device including the monitoring method
SAMSUNG ELECTRONICS CO LTD0 citations56
US11720027B2Aug 8, 2023
Apparatus for generating extreme ultraviolet light and lithography apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations43