P

Inventor

MIZUNO MAKOTO

JP50 patents
⚠️ This page may combine multiple inventors who share the name “MIZUNO MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

19 patents
US5822133AOct 13, 1998

Optical structure and device manufacturing method using the same

CANON KK99 citations95
US7110089B2Sep 19, 2006

Drive mechanism, exposure device, optical equipment, and device manufacturing method

CANON KK24 citations93
US6750947B1Jun 15, 2004

Driving device and exposure apparatus

CANON KK23 citations93
US6396566B2May 28, 2002

Stage system for exposure apparatus and device manufacturing method in which a stage supporting member and a countermass supporting member provide vibration isolation

CANON KK44 citations93
US7760452B2Jul 20, 2010

Driving apparatus, optical system, exposure apparatus and device fabrication method

CANON KK8 citations84
US7221463B2May 22, 2007

Positioning apparatus, exposure apparatus, and method for producing device

CANON KK13 citations84
US7145270B2Dec 5, 2006

Driving unit, exposure apparatus using the same, and device fabrication method

CANON KK17 citations84
US7187106B2Mar 6, 2007

Positioning mechanism, exposure apparatus and device manufacturing method

CANON KK11 citations81
US9770850B2Sep 26, 2017

Imprint apparatus and article manufacturing method

CANON KK2 citations73
US10201927B2Feb 12, 2019

Imprint apparatus, foreign particle removal method, and method of manufacturing article

CANON KK5 citations72
US7675695B2Mar 9, 2010

Optical element holding apparatus

CANON KK2 citations63
US7821726B2Oct 26, 2010

Optical element positioning apparatus, projection optical system and exposure apparatus

CANON KK3 citations62
US7684136B2Mar 23, 2010

Driving system and optical-element driving system

CANON KK2 citations62
US7460320B2Dec 2, 2008

Driving system and optical-element driving system

CANON KK4 citations62
US10969680B2Apr 6, 2021

System and method for adjusting a position of a template

CANON KK0 citations52
US7948695B2May 24, 2011

Optical element positioning apparatus, projection optical system and exposure apparatus

CANON KK1 citations52
US7894036B2Feb 22, 2011

Exposure apparatus

CANON KK0 citations52
US7859773B2Dec 28, 2010

Driving mechanism and optical element driving apparatus

CANON KK0 citations52
US12044962B2Jul 23, 2024

Forming apparatus, forming method, and article manufacturing method

CANON KK0 citations50

RENESAS TECH CORP

6 patents

KAWASAKI STEEL CO

5 patents

RENESAS ELECTRONICS CORP

3 patents

HITACHI ULSI SYS CO LTD

3 patents

SHACHIHATA INDUSTRIAL

2 patents

TOYOTA MOTOR CO LTD

1 patent

CHAKIHARA HIRAKU

1 patent

STS CORP

1 patent

SANKYO CO

1 patent

ATOM CHEM PAINT CO LTD

1 patent

MATSUBARA KEN

1 patent

WAKABAYASHI KOHEI

1 patent

FUJITO MASAMICHI

1 patent

DAIICHI SANKYO CO LTD

1 patent

ITO FUMITOSHI

1 patent

UNIV KEIO

1 patent

MIZUNO MAKOTO

1 patent