Inventor
MIZUNO MAKOTO
JP50 patents
⚠️ This page may combine multiple inventors who share the name “MIZUNO MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
19 patentsUS5822133AOct 13, 1998
Optical structure and device manufacturing method using the same
CANON KK99 citations95
US7110089B2Sep 19, 2006
Drive mechanism, exposure device, optical equipment, and device manufacturing method
CANON KK24 citations93
US6750947B1Jun 15, 2004
Driving device and exposure apparatus
CANON KK23 citations93
US6396566B2May 28, 2002
Stage system for exposure apparatus and device manufacturing method in which a stage supporting member and a countermass supporting member provide vibration isolation
CANON KK44 citations93
US7760452B2Jul 20, 2010
Driving apparatus, optical system, exposure apparatus and device fabrication method
CANON KK8 citations84
US7221463B2May 22, 2007
Positioning apparatus, exposure apparatus, and method for producing device
CANON KK13 citations84
US7145270B2Dec 5, 2006
Driving unit, exposure apparatus using the same, and device fabrication method
CANON KK17 citations84
US7187106B2Mar 6, 2007
Positioning mechanism, exposure apparatus and device manufacturing method
CANON KK11 citations81
US9770850B2Sep 26, 2017
Imprint apparatus and article manufacturing method
CANON KK2 citations73
US10201927B2Feb 12, 2019
Imprint apparatus, foreign particle removal method, and method of manufacturing article
CANON KK5 citations72
US7675695B2Mar 9, 2010
Optical element holding apparatus
CANON KK2 citations63
US7821726B2Oct 26, 2010
Optical element positioning apparatus, projection optical system and exposure apparatus
CANON KK3 citations62
US7684136B2Mar 23, 2010
Driving system and optical-element driving system
CANON KK2 citations62
US7460320B2Dec 2, 2008
Driving system and optical-element driving system
CANON KK4 citations62
US10969680B2Apr 6, 2021
System and method for adjusting a position of a template
CANON KK0 citations52
US7948695B2May 24, 2011
Optical element positioning apparatus, projection optical system and exposure apparatus
CANON KK1 citations52
US7894036B2Feb 22, 2011
Exposure apparatus
CANON KK0 citations52
US7859773B2Dec 28, 2010
Driving mechanism and optical element driving apparatus
CANON KK0 citations52
US12044962B2Jul 23, 2024
Forming apparatus, forming method, and article manufacturing method
CANON KK0 citations50
RENESAS TECH CORP
6 patentsUS7087955B2Aug 8, 2006
Semiconductor device and a method of manufacturing the same
RENESAS TECH CORP27 citations92
US7646642B2Jan 12, 2010
Semiconductor device
RENESAS TECH CORP20 citations91
US7701020B2Apr 20, 2010
Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device
RENESAS TECH CORP5 citations74
US7495289B2Feb 24, 2009
Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device
RENESAS TECH CORP4 citations74
US7349250B2Mar 25, 2008
Semiconductor device
RENESAS TECH CORP7 citations72
US7719052B2May 18, 2010
Semiconductor device
RENESAS TECH CORP1 citations61
KAWASAKI STEEL CO
5 patentsUS6525350B1Feb 25, 2003
Semiconductor integrated circuit basic cell semiconductor integrated circuit using the same
KAWASAKI STEEL CO318 citations98
US6049132AApr 11, 2000
Multiple metallization structure for a reflection type liquid crystal display
KAWASAKI STEEL CO70 citations94
US6266110B1Jul 24, 2001
Semiconductor device reeventing light from entering its substrate transistor and the same for driving reflection type liquid crystal
KAWASAKI STEEL CO36 citations90
US5888900AMar 30, 1999
Method for manufacturing semiconductor device and reticle for wiring
KAWASAKI STEEL CO10 citations71
US5391509AFeb 21, 1995
Method of manufacturing a semiconductor device forming a high concentration impurity region through a CVD insulating film
KAWASAKI STEEL CO4 citations58
RENESAS ELECTRONICS CORP
3 patentsHITACHI ULSI SYS CO LTD
3 patentsUS7190031B2Mar 13, 2007
Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device
HITACHI ULSI SYS CO LTD18 citations92
US7972920B2Jul 5, 2011
Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device
HITACHI ULSI SYS CO LTD7 citations84
US7161215B2Jan 9, 2007
Semiconductor memory device and method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device
HITACHI ULSI SYS CO LTD3 citations63