Inventor

WENG JUI-CHUN

TW37 patents

⚠️ This page may combine multiple inventors who share the name “WENG JUI-CHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WENG JUI-CHUN

TAIWAN SEMICONDUCTOR MFG CO LTD

Multifunctional collimator for contact image sensors

Movement microelectromechanical systems (MEMS) package

Photomask assembly and method of forming the same

Pellicle frame with stress relief trenches

Inter-poly connection for parasitic capacitor and die size improvement

Photomask assembly and method of forming the same

Anti-stiction process for MEMS device

Anti-stiction process for MEMS device

Inter-poly connection for parasitic capacitor and die size improvement

Heater design for MEMS chamber pressure control

Selective nitride outgassing process for MEMS cavity pressure control

Method of manufacturing a motion sensor device

Multifunctional collimator for contact image sensors

Multifunctional collimator for contact image sensors

Multifunctional collimator for contact image sensors

Metal-insulator-metal (MIM) capacitor with an electrode scheme for improved manufacturability and reliability

Inter-poly connection for parasitic capacitor and die size improvement

Semiconductor structure and method of making

Photomask assembly and method of forming the same

Anti-stiction process for MEMS device

Optical sensor and methods of making the same

Multifunctional collimator for contact image sensors

Pellicle frame with stress relief trenches

Roughness selectivity for MEMS movement stiction reduction

Pellicle frame with stress relief trenches

Roughness selectivity for MEMS movement stiction reduction

Multifunctional collimator for contact image sensors

Wafer bonding alignment

Wafer bonding alignment

Mechanism for forming MEMS device

Heater design for MEMS chamber pressure control

Method of fabricating MEMS devices having a plurality of cavities

Test structure and integrated circuit test using same

TAIWAN SEMICONDUCTOR MFG

MEMS devices having a plurality of cavities

Ion implanter and method of preventing undesirable ions from implanting a target wafer

CHENG SHYH-WEI

Motion sensor device and methods for forming the same

CHANG YUH-HWA

Delamination resistant semiconductor film and method for forming the same