Inventor
HSU HSI-CHENG
TW34 patents
⚠️ This page may combine multiple inventors who share the name “HSU HSI-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
32 patentsUS11543363B2Jan 3, 2023
Systems and methods for wafer bond monitoring
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations85
US11454820B2Sep 27, 2022
Multifunctional collimator for contact image sensors
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US9527721B2Dec 27, 2016
Movement microelectromechanical systems (MEMS) package
TAIWAN SEMICONDUCTOR MFG CO LTD14 citations81
US11789360B2Oct 17, 2023
Photomask assembly and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11407636B2Aug 9, 2022
Inter-poly connection for parasitic capacitor and die size improvement
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US11392024B2Jul 19, 2022
Photomask assembly and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11305980B2Apr 19, 2022
Anti-stiction process for MEMS device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10513432B2Dec 24, 2019
Anti-stiction process for MEMS device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10155656B2Dec 18, 2018
Inter-poly connection for parasitic capacitor and die size improvement
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations72
US10131536B2Nov 20, 2018
Heater design for MEMS chamber pressure control
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9884758B2Feb 6, 2018
Selective nitride outgassing process for MEMS cavity pressure control
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9880192B2Jan 30, 2018
Method of manufacturing a motion sensor device
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US11782284B2Oct 10, 2023
Multifunctional collimator for contact image sensors
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11726342B2Aug 15, 2023
Multifunctional collimator for contact image sensors
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11448891B2Sep 20, 2022
Multifunctional collimator for contact image sensors
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12583740B2Mar 24, 2026
Inter-poly connection for parasitic capacitor and die size improvement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12454455B2Oct 28, 2025
Semiconductor structure and method of making
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12242181B2Mar 4, 2025
Photomask assembly and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12157667B2Dec 3, 2024
Anti-stiction process for MEMS device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12085518B2Sep 10, 2024
Systems and methods for wafer bond monitoring
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11815471B2Nov 14, 2023
Systems and methods for wafer bond monitoring
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12271006B2Apr 8, 2025
Multifunctional collimator for contact image sensors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12054382B2Aug 6, 2024
Roughness selectivity for MEMS movement stiction reduction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11655138B2May 23, 2023
Roughness selectivity for MEMS movement stiction reduction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12092839B2Sep 17, 2024
Multifunctional collimator for contact image sensors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12283568B2Apr 22, 2025
Wafer bonding alignment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11742320B2Aug 29, 2023
Wafer bonding alignment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12466727B2Nov 11, 2025
Extended acid etch for oxide removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11655146B2May 23, 2023
Extended acid etch for oxide removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US9090452B2Jul 28, 2015
Mechanism for forming MEMS device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations58
US10532925B2Jan 14, 2020
Heater design for MEMS chamber pressure control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9561954B2Feb 7, 2017
Method of fabricating MEMS devices having a plurality of cavities
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51