Inventor
UEDA TAKEHIRO
JP59 patents
⚠️ This page may combine multiple inventors who share the name “UEDA TAKEHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
17 patentsUSD553104SOct 16, 2007
Absorption board for an electric chuck used in semiconductor manufacture
TOKYO ELECTRON LTD598 citations98
US8904957B2Dec 9, 2014
Plasma processor and plasma processing method
TOKYO ELECTRON LTD12 citations91
US9728381B2Aug 8, 2017
Plasma processor and plasma processing method
TOKYO ELECTRON LTD4 citations83
US9437402B2Sep 6, 2016
Plasma processor and plasma processing method
TOKYO ELECTRON LTD11 citations83
US11309168B2Apr 19, 2022
Vacuum processing apparatus and maintenance apparatus
TOKYO ELECTRON LTD2 citations73
US11121010B2Sep 14, 2021
Plasma processing apparatus
TOKYO ELECTRON LTD2 citations73
US11443925B2Sep 13, 2022
Substrate support and plasma processing apparatus
TOKYO ELECTRON LTD0 citations63
US11929240B2Mar 12, 2024
Substrate support, substrate processing apparatus, and substrate processing method
TOKYO ELECTRON LTD0 citations62
US11923228B2Mar 5, 2024
Stage and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US11756808B2Sep 12, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations62
US11582854B2Feb 14, 2023
Mounting table and charge neutralization method for target object
TOKYO ELECTRON LTD0 citations62
US11201038B2Dec 14, 2021
Support assembly and support assembly assembling method
TOKYO ELECTRON LTD0 citations62
US7592261B2Sep 22, 2009
Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system
TOKYO ELECTRON LTD2 citations62
US11201039B2Dec 14, 2021
Mounting apparatus for object to be processed and processing apparatus
TOKYO ELECTRON LTD0 citations52
US11037767B2Jun 15, 2021
Substrate support, substrate processing apparatus, substrate processing system, and method of detecting erosion of adhesive in substrate support
TOKYO ELECTRON LTD0 citations52
US10968925B2Apr 6, 2021
Gas cylinder
TOKYO ELECTRON LTD0 citations52
US8869376B2Oct 28, 2014
Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism
TOKYO ELECTRON LTD0 citations52
RENESAS ELECTRONICS CORP
15 patentsUS8362524B2Jan 29, 2013
Semiconductor device having a fuse element
RENESAS ELECTRONICS CORP3 citations74
US7989913B2Aug 2, 2011
Semiconductor device and method for cutting electric fuse
RENESAS ELECTRONICS CORP6 citations74
US12334410B2Jun 17, 2025
Semiconductor device with protective film for reducing aluminum slide in aluminum wiring and manufacturing method thereof
RENESAS ELECTRONICS CORP0 citations63
US9177912B2Nov 3, 2015
Semiconductor device having a fuse element
RENESAS ELECTRONICS CORP1 citations63
US11387334B2Jul 12, 2022
Semiconductor device with electrode plating deposition
RENESAS ELECTRONICS CORP0 citations62
US11175321B1Nov 16, 2021
Semiconductor device
RENESAS ELECTRONICS CORP1 citations62
US10396153B2Aug 27, 2019
Semiconductor device and method of manufacturing semiconductor device
RENESAS ELECTRONICS CORP1 citations62
US12289918B2Apr 29, 2025
Semiconductor device having integrated turn-on and turn-off resistors and diode
RENESAS ELECTRONICS CORP0 citations52
US11887935B2Jan 30, 2024
Semiconductor device and manufacturing method thereof
RENESAS ELECTRONICS CORP0 citations52
US10135435B2Nov 20, 2018
Switching device with surge recirculation device and surge recirculation line
RENESAS ELECTRONICS CORP0 citations52
US9620449B2Apr 11, 2017
Semiconductor device having a fuse element
RENESAS ELECTRONICS CORP0 citations52
US8871592B2Oct 28, 2014
Method of manufacturing a semiconductor device including concave portion
RENESAS ELECTRONICS CORP0 citations52
US8742465B2Jun 3, 2014
Semiconductor device
RENESAS ELECTRONICS CORP0 citations52
US8610178B2Dec 17, 2013
Semiconductor device having a fuse element
RENESAS ELECTRONICS CORP0 citations52
US8372730B2Feb 12, 2013
Method for cutting an electric fuse
RENESAS ELECTRONICS CORP0 citations52
NEC ELECTRONICS CORP
11 patentsUS7282751B2Oct 16, 2007
Semiconductor device
NEC ELECTRONICS CORP33 citations96
US7635907B2Dec 22, 2009
Semiconductor device with electric fuse having a flowing-out region
NEC ELECTRONICS CORP14 citations84
US7529147B2May 5, 2009
Semiconductor device and method of fabricating the same
NEC ELECTRONICS CORP11 citations84
US7489230B2Feb 10, 2009
Semiconductor device and method of manufacturing the same
NEC ELECTRONICS CORP8 citations84
US7411851B2Aug 12, 2008
Semiconductor device
NEC ELECTRONICS CORP13 citations84
US7728407B2Jun 1, 2010
Semiconductor device and method of cutting electrical fuse
NEC ELECTRONICS CORP7 citations74
US7376036B2May 20, 2008
Semiconductor device including fuse and method for testing the same capable of suppressing erroneous determination
NEC ELECTRONICS CORP8 citations74
US7835211B2Nov 16, 2010
Semiconductor device and method of fabricating the same
NEC ELECTRONICS CORP4 citations63
US7795699B2Sep 14, 2010
Semiconductor device
NEC ELECTRONICS CORP5 citations63
US7679871B2Mar 16, 2010
Semiconductor device and method for determining fuse state
NEC ELECTRONICS CORP6 citations63
US7619264B2Nov 17, 2009
Semiconductor device
NEC ELECTRONICS CORP4 citations63
UEDA TAKEHIRO
3 patentsUS8491752B2Jul 23, 2013
Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism
UEDA TAKEHIRO7 citations83
US8476701B2Jul 2, 2013
Semiconductor device with gate electrode including a concave portion
UEDA TAKEHIRO9 citations83
US9000559B2Apr 7, 2015
Semiconductor device, method of cutting electrical fuse, and method of determining electrical fuse state
UEDA TAKEHIRO3 citations62
KIKUCHI AKIHIRO
2 patentsSUMITOMO OSAKA CEMENT CO LTD
1 patentSASAKI YASUHARU
1 patentShowing the top 50 of 59 patents by PatentIndex Score.