Inventor
TEZUKA KAZUYUKI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TEZUKA KAZUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUSD494552SAug 17, 2004
Exhaust ring for manufacturing semiconductors
TOKYO ELECTRON LTD432 citations98
US7299104B2Nov 20, 2007
Substrate processing apparatus and substrate transferring method
TOKYO ELECTRON LTD24 citations92
US7472581B2Jan 6, 2009
Vacuum apparatus
TOKYO ELECTRON LTD18 citations83
US11532467B2Dec 20, 2022
Maintenance device
TOKYO ELECTRON LTD0 citations51
US10665431B2May 26, 2020
Processing method
TOKYO ELECTRON LTD0 citations40