Inventor
PENG CHUI-YA
TW31 patents
Patents
31 patentsUS9589969B1Mar 7, 2017
Semiconductor device and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations81
US12080567B2Sep 3, 2024
Systems and methods for in-situ Marangoni cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11923210B2Mar 5, 2024
Systems and methods for in-situ Marangoni cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10319857B2Jun 11, 2019
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US9812570B2Nov 7, 2017
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US9780209B1Oct 3, 2017
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations70
US10818563B2Oct 27, 2020
Method for calibrating temperature in chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US10515861B2Dec 24, 2019
Method for calibrating temperature in chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US10325796B2Jun 18, 2019
Apparatus and system for detecting wafer damage
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations66
US12482675B2Nov 25, 2025
Systems and methods for in-situ Marangoni cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11735440B2Aug 22, 2023
Automated wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11411108B2Aug 9, 2022
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11342202B2May 24, 2022
Automated wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12507472B2Dec 23, 2025
Method of making polysilicon structure including protective layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12068179B2Aug 20, 2024
Systems and methods for shuttered wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11855086B2Dec 26, 2023
Polysilicon structure including protective layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11610825B2Mar 21, 2023
Method for calibrating temperature in chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11355366B2Jun 7, 2022
Systems and methods for shuttered wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11282673B2Mar 22, 2022
Ion implantation system and source bushing thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10957697B2Mar 23, 2021
Polysilicon structure including protective layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10784079B2Sep 22, 2020
Ion implantation system and source bushing thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US12198953B2Jan 14, 2025
System and method for operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11721567B2Aug 8, 2023
System and method for operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11227780B2Jan 18, 2022
System and method for operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11162174B2Nov 2, 2021
Liquid delivery and vaporization apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53
US9324603B2Apr 26, 2016
Semiconductor structures with shallow trench isolations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10818790B2Oct 27, 2020
Semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9978634B2May 22, 2018
Method for fabricating shallow trench isolation and semiconductor structure using the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations50
US11527380B2Dec 13, 2022
Ion implanter toxic gas delivery system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10050035B2Aug 14, 2018
Method of making protective layer over polysilicon structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US11139183B2Oct 5, 2021
Systems and methods for dry wafer transport
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48