Inventor

KASHEFI KEVIN

US23 patents

⚠️ This page may combine multiple inventors who share the name “KASHEFI KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KASHEFI KEVIN

APPLIED MATERIALS INC

Method of forming a metal liner for interconnect structures

Selective blocking of metal surfaces using bifunctional self-assembled monolayers

Self-assembled monolayer for selective deposition

Reverse selective etch stop layer

Chlorine-free removal of molybdenum oxides from substrates

Process chamber collimator

Process chamber collimator

Selective blocking of metal surfaces using bifunctional self-assembled monolayers

Multi-step pre-clean for selective metal gap fill

Multi-step pre-clean for selective metal gap fill

Method to deposit metal cap for interconnect

Methods of forming interconnect structures

Self-assembled monolayer for selective deposition

Electromagnet pulsing effect on PVD step coverage

Metal oxide preclean for bottom-up gapfill in MEOL and BEOL

Apparatus and methods for self-assembled monolayer (SAM) deposition in semiconductor equipment

INTERMOLECULAR INC

Tunneling barrier creation in MSM stack as a selector device for non-volatile memory application

Surface preparation with remote plasma

Diamond like carbon (DLC) as a thermal sink in a selector stack for non-volatile memory application

Reduction of native oxides by annealing in reducing gas or plasma

Photo-induced MSM stack

GLOBALFOUNDRIES INC

Methods for fabricating integrated circuits including fluorine incorporation

Deposition of titanium-aluminum layers