Inventor
KIM RYOUNG-HAN
US21 patents
⚠️ This page may combine multiple inventors who share the name “KIM RYOUNG-HAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
7 patentsUS7767985B2Aug 3, 2010
EUV pellicle and method for fabricating semiconductor dies using same
GLOBALFOUNDRIES INC38 citations92
US7723704B2May 25, 2010
EUV pellicle with increased EUV light transmittance
GLOBALFOUNDRIES INC15 citations83
US7718529B2May 18, 2010
Inverse self-aligned spacer lithography
GLOBALFOUNDRIES INC10 citations83
US7663127B2Feb 16, 2010
EUV debris mitigation filter and method for fabricating semiconductor dies using same
GLOBALFOUNDRIES INC9 citations83
US7851136B2Dec 14, 2010
Stabilization of deep ultraviolet photoresist
GLOBALFOUNDRIES INC4 citations62
US7829266B2Nov 9, 2010
Multiple exposure technique using OPC to correct distortion
GLOBALFOUNDRIES INC2 citations62
US8009274B2Aug 30, 2011
In-die focus monitoring with binary mask
GLOBALFOUNDRIES INC1 citations51
KIM RYOUNG-HAN
7 patentsUS8664113B2Mar 4, 2014
Multilayer interconnect structure and method for integrated circuits
KIM RYOUNG-HAN11 citations83
US8450833B2May 28, 2013
Spacer double patterning that prints multiple CD in front-end-of-line
KIM RYOUNG-HAN17 citations83
US8435884B2May 7, 2013
Method for forming an interconnect structure
KIM RYOUNG-HAN3 citations62
US8303831B2Nov 6, 2012
Methods for fabricating semiconductor devices
KIM RYOUNG-HAN4 citations61
US8236592B2Aug 7, 2012
Method of forming semiconductor device
KIM RYOUNG-HAN2 citations55
US8642474B2Feb 4, 2014
Spacer lithography
KIM RYOUNG-HAN1 citations51
US8445182B2May 21, 2013
Double exposure technology using high etching selectivity
KIM RYOUNG-HAN0 citations49