Inventor

VARADARAJAN BHADRI N

US45 patents

⚠️ This page may combine multiple inventors who share the name “VARADARAJAN BHADRI N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARADARAJAN BHADRI N

LAM RES CORP

Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors

Vacuum-integrated hardmask processes and apparatus

Vacuum-integrated hardmask processes and apparatus

Method for encapsulating a chalcogenide material

Densification of silicon carbide film using remote plasma treatment

Vacuum-integrated hardmask processes and apparatus

Vacuum-integrated hardmask processes and apparatus

Staircase encapsulation in 3D NAND fabrication

Ground state hydrogen radical sources for chemical vapor deposition of silicon-carbon-containing films

Remote plasma based deposition of graded or multi-layered silicon carbide film

Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma

Methods of encapsulation

Staircase encapsulation in 3D NAND fabrication

Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors

Selective formation of dielectric barriers for metal interconnects in semiconductor devices

Remote plasma based deposition of boron nitride, boron carbide, and boron carbonitride films

Methods of encapsulation

Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma

Conformal deposition of silicon carbide films using heterogeneous precursor interaction

Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors

Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursors

Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill

Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

Methods of encapsulation

Methods and apparatus for depositing silicon oxide on metal layers

Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill

Graphene integration

NOVELLUS SYSTEMS INC

PMOS transistor with compressive dielectric capping layer

Method to obtain SiC class of films of desired composition and film properties

Method to obtain SiC class of films of desired composition and film properties

Conformal deposition of silicon carbide films

Conformal deposition of silicon carbide films

Films of desired composition and film properties

Films of desired composition and film properties

Films of desired composition and film properties

Films of desired composition and film properties

Conformal deposition of silicon carbide films

Remote plasma based deposition of oxygen doped silicon carbide films

PMOS transistor with compressive dielectric capping layer

Conformal deposition of silicon carbide films

Systems and methods for at least partially converting films to silicon oxide and/or improving film quality using ultraviolet curing in steam and densification of films using UV curing in ammonia

VARADARAJAN BHADRI N

Progressive UV cure

Carbon containing low-k dielectric constant recovery using UV treatment

Systems and methods for at least partially converting films to silicon oxide and/or improving film quality using ultraviolet curing in steam and densification of films using UV curing in ammonia