Inventor

MANGER MATTHIAS

DE27 patents

⚠️ This page may combine multiple inventors who share the name “MANGER MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MANGER MATTHIAS

ZEISS CARL SMT GMBH

Method for producing an illumination system for an EUV projection exposure system, and illumination system

Measuring assembly for the frequency-based determination of the position of a component

Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus

Beam propagation camera and method for light beam analysis

Method for measuring an optical system

Method and device for beam analysis

Method and device for beam analysis

Metrology system and method for measuring an excitation laser beam in an EUV plasma source

Device and method for measuring the beam angle of a light beam guided by a beam guiding optical unit

Method for producing an illumination system for an EUV projection exposure system, and illumination system

Projection exposure apparatus for semiconductor lithography

Optical system and lithography apparatus

Optical assembly, method for controlling an optical assembly, and projection exposure apparatus

Drive device, optical system and lithography apparatus

System and method for analyzing a light beam guided by a beam guiding optical unit

Projection exposure system for microlithography and method of monitoring a lateral imaging stability

Method for calibrating a manipulable optical module

ZEISS CARL SMT AG

Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask

Device and method for range-resolved determination of scattered light, and an illumination mask

Method and apparatus for determining at least one optical property of an imaging optical system

SIEMENS AG

Electrical junction box for motor diagnosis

Electrical junction box for motor diagnosis

FREIMANN ROLF

Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device

SCHELLHORN UWE

Method for determination of residual errors

HUEBEL ALEXANDER

Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage

MANGER MATTHIAS

Projection exposure system for microlithography and method of monitoring a lateral imaging stability

KRAEHMER DANIEL

Optical system for microlithography