Inventor
AMEMIYA MITSUAKI
JP43 patents
⚠️ This page may combine multiple inventors who share the name “AMEMIYA MITSUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
42 patentsUS5231291AJul 27, 1993
Wafer table and exposure apparatus with the same
CANON KK149 citations98
US5093579AMar 3, 1992
Exposure apparatus with a substrate holding mechanism
CANON KK61 citations96
US5524131AJun 4, 1996
Alignment apparatus and SOR x-ray exposure apparatus having same
CANON KK46 citations95
US6647086B2Nov 11, 2003
X-ray exposure apparatus
CANON KK39 citations93
US5606586AFeb 25, 1997
X-ray exposure method and apparatus and device manufacturing method
CANON KK21 citations93
US5440394AAug 8, 1995
Length-measuring device and exposure apparatus
CANON KK25 citations93
US5323440AJun 21, 1994
X-ray lithography apparatus including a dose detectable mask
CANON KK21 citations93
US5159621AOct 27, 1992
X-ray transmitting window and method of mounting the same
CANON KK22 citations93
US5157700AOct 20, 1992
Exposure apparatus for controlling intensity of exposure radiation
CANON KK41 citations93
US4906326AMar 6, 1990
Mask repair system
CANON KK40 citations93
US6331709B1Dec 18, 2001
Alignment mark detection method, and alignment method, exposure method and device, and device production method making use of the alignment mark detection method
CANON KK17 citations92
US5835560ANov 10, 1998
Exposure apparatus
CANON KK33 citations92
US5822389AOct 13, 1998
Alignment apparatus and SOR X-ray exposure apparatus having same
CANON KK36 citations92
US5138643AAug 11, 1992
Exposure apparatus
CANON KK42 citations92
US7312459B2Dec 25, 2007
Apparatus for evaluating EUV light source, and evaluation method using the same
CANON KK12 citations84
US5131022AJul 14, 1992
Exposure method and apparatus
CANON KK20 citations82
US6455203B1Sep 24, 2002
Mask structure and method of manufacturing the same
CANON KK10 citations74
US6453001B2Sep 17, 2002
X-ray exposure apparatus
CANON KK6 citations74
US6324250B1Nov 27, 2001
Exposure method
CANON KK9 citations74
US6272202B1Aug 7, 2001
Exposure method and X-ray mask structure for use with the same
CANON KK14 citations74
US5680428AOct 21, 1997
Process for holding an object
CANON KK9 citations74
US5604779AFeb 18, 1997
Optical exposure method and device formed by the method
CANON KK17 citations74
US5581590ADec 3, 1996
SOR exposure system and method of manufacturing semiconductor devices using same
CANON KK13 citations74
US5444758AAug 22, 1995
Beam position detecting device
CANON KK17 citations74
US5400386AMar 21, 1995
Angle detecting device and optical apparatus, such as exposure apparatus, employing the same
CANON KK9 citations74
US5267292ANov 30, 1993
X-ray exposure apparatus
CANON KK16 citations74
US5172403ADec 15, 1992
X-ray exposure apparatus
CANON KK19 citations74
US4935947AJun 19, 1990
X-ray exposure apparatus
CANON KK8 citations74
US4604345AAug 5, 1986
Exposure method
CANON KK7 citations74
US7465936B2Dec 16, 2008
Measuring method, exposure apparatus, and device manufacturing method
CANON KK4 citations63
US7014707B2Mar 21, 2006
Apparatus and process for producing crystal article, and thermocouple used therein
CANON KK5 citations63
US6647087B2Nov 11, 2003
Exposure method
CANON KK3 citations63
US6327332B1Dec 4, 2001
Exposure method
CANON KK3 citations63
US9036789B2May 19, 2015
X-ray apparatus and its adjusting method
CANON KK3 citations61
US11112511B2Sep 7, 2021
Radiation detector and compton camera
CANON KK0 citations52
US7633598B2Dec 15, 2009
Filter exposure apparatus, and device manufacturing method
CANON KK1 citations52
US6645707B2Nov 11, 2003
Device manufacturing method
CANON KK1 citations52
US6642528B2Nov 4, 2003
Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection method
CANON KK1 citations52
US9020104B2Apr 28, 2015
X-ray optical apparatus and adjusting method thereof
CANON KK0 citations51
US7271875B2Sep 18, 2007
Alignment apparatus, exposure apparatus and device fabrication method
CANON KK0 citations51
US9020102B2Apr 28, 2015
X-ray optical apparatus
CANON KK0 citations42
US9020098B2Apr 28, 2015
Radiation imaging apparatus
CANON KK0 citations42