X-ray exposure apparatus

Abstract

A device for generating X-rays is disclosed, which includes a portion for producing plasma in a predetermined space, for generation of the X-rays, and a wall uni effective to define a surface substantially surrounding the space, the wall unit including a portion which is made of a dielectric material and which is made movable so as to compensate for consumption of the dielectric material due to the production of the plasma by the plasma producing portion. Also, an X-ray exposure apparatus usable with a mask having a pattern and a wafer, for transferring the pattern of the mask onto the wafer, is disclosed. The apparatus includes an X-ray source for producing X-rays, an exposure system for exposing the mask and the wafer under an exposure condition, the exposing system including a holder for holding the mask and the wafer so that the mask is exposed to the X-rays from the X-ray source and so that the wafer is exposed to the X-rays passed through the mask, such that the pattern of the mask is transferred onto the wafer, and a control system for controlling the exposure condition so that the pattern transferred onto the wafer has a desired width of line.

What is claimed is: 
     
       1. A device for generating X-rays, comprising: means for producing plasma in a predetermined space, for generation of the X-rays; and   wall means effective to define a surface substantially surrounding said space, said wall means including a portion which is made of a dielectric material and which is made movable so as to compensate for consumption of the dielectric material due to the production of the plasma by said plasma producing means, wherein said dielectric portion of said wall means includes a plurality of sheet-like dielectric members and wherein said surface substantially surrounding said space is defined by cooperation of portions of surfaces of said sheet-like dielectric members.   
     
     
       2. A device according to claim 1, wherein each of said sheet-like dielectric members is arranged to move so that a surface portion thereof facing said space is replaced by another surface portion after the material forming the first-mentioned portion is at least partially consumed by the production of the plasma. 
     
     
       3. A device according to claim 2, wherein each of said sheet-like dielectric members is made of polyethylene. 
     
     
       4. A device according to claim 2, wherein each of said sheet-like dielectric members has a material applied to its surface and effective to generate X-rays of a desired wavelength. 
     
     
       5. A device for generating X-rays, comprising: means for producing plasma in a predetermined space, for generation of the X-rays; and   wall means effective to define a surface substantially surrounding said space, said wall means including a portion which is made of a dielectric material and which is made movable so as to compensate for consumption of the dielectric material due to the production of the plasma by said plasma producing means, wherein said dielectric portion includes a plurality of dielectric members each having a surface and wherein portions of the surfaces of said dielectric members cooperate to define said surface substantially surrounding said space.   
     
     
       6. A device according to claim 5, wherein each of said dielectric members is arranged to move toward said space in which the plasma is produced, and by an amount corresponding to the amount of reduction of the dielectric material forming the surface of said dielectric member that forms said surface substantially surrounding said space. 
     
     
       7. A device according to claim 1, wherein said wall means is effective to define said surface so that it forms said space into an elongated shape. 
     
     
       8. A device according to claim 7, wherein said wall mean defines an opening through which the X-rays generated in said space are emitted. 
     
     
       9. A device according to claim 7, wherein said wall means is arranged so that, when the generated X-rays are emitted, the X-rays pass through a portion of said surface substantially surrounding said space. 
     
     
       10. A device according to claim 1, wherein said wall means is arranged to define a groove, said groove having an inner surface effective to substantially surround said space. 
     
     
       11. A device for generating X-rays, comprising: means for producing plasma in a predetermined space, for generation of the X-rays; and   wall means effective to define a surface substantially surrounding said space, said wall means including a portion which is made of a dielectric material and which is made movable so as to compensate for consumption of the dielectric material due to the production of the plasma by said plasma producing means, wherein said wall means includes means for moving said dielectric portion.   
     
     
       12. A device according to claim 11, wherein said wall means includes means for controlling said moving means. 
     
     
       13. A device according to claim 12, wherein said plasma producing means includes means for causing creeping discharge along said surface, and wherein said controlling means is effective also to control said creeping discharge causing means. 
     
     
       14. A device according to claim 13, wherein said controlling means is arranged to actuate said moving means each time said creeping discharge causing means operates to cause the creeping discharge once or by a predetermined number of times.