Inventor
LUO TIEN-YING
US22 patents
⚠️ This page may combine multiple inventors who share the name “LUO TIEN-YING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FREESCALE SEMICONDUCTOR INC
15 patentsUS7144825B2Dec 5, 2006
Multi-layer dielectric containing diffusion barrier material
FREESCALE SEMICONDUCTOR INC55 citations95
US6884685B2Apr 26, 2005
Radical oxidation and/or nitridation during metal oxide layer deposition process
FREESCALE SEMICONDUCTOR INC22 citations92
US7981808B2Jul 19, 2011
Method of forming a gate dielectric by in-situ plasma
FREESCALE SEMICONDUCTOR INC8 citations84
US7445984B2Nov 4, 2008
Method for removing nanoclusters from selected regions
FREESCALE SEMICONDUCTOR INC10 citations83
US7432158B1Oct 7, 2008
Method for retaining nanocluster size and electrical characteristics during processing
FREESCALE SEMICONDUCTOR INC11 citations83
US7402472B2Jul 22, 2008
Method of making a nitrided gate dielectric
FREESCALE SEMICONDUCTOR INC9 citations83
US7651935B2Jan 26, 2010
Process of forming an electronic device including active regions and gate electrodes of different compositions overlying the active regions
FREESCALE SEMICONDUCTOR INC10 citations82
US8017469B2Sep 13, 2011
Dual high-k oxides with sige channel
FREESCALE SEMICONDUCTOR INC14 citations80
US7829447B2Nov 9, 2010
Semiconductor structure pattern formation
FREESCALE SEMICONDUCTOR INC7 citations73
US7001852B2Feb 21, 2006
Method of making a high quality thin dielectric layer
FREESCALE SEMICONDUCTOR INC2 citations63
US7776731B2Aug 17, 2010
Method of removing defects from a dielectric material in a semiconductor
FREESCALE SEMICONDUCTOR INC2 citations62
US7767588B2Aug 3, 2010
Method for forming a deposited oxide layer
FREESCALE SEMICONDUCTOR INC6 citations62
US7741183B2Jun 22, 2010
Method of forming a gate dielectric
FREESCALE SEMICONDUCTOR INC3 citations62
US7678698B2Mar 16, 2010
Method of forming a semiconductor device with multiple tensile stressor layers
FREESCALE SEMICONDUCTOR INC3 citations62
US7700499B2Apr 20, 2010
Multilayer silicon nitride deposition for a semiconductor device
FREESCALE SEMICONDUCTOR INC0 citations41
GLOBALFOUNDRIES INC
5 patentsUS9312145B2Apr 12, 2016
Conformal nitridation of one or more fin-type transistor layers
GLOBALFOUNDRIES INC2 citations61
US9202697B2Dec 1, 2015
Forming a gate by depositing a thin barrier layer on a titanium nitride cap
GLOBALFOUNDRIES INC2 citations61
US9147696B2Sep 29, 2015
Devices and methods of forming finFETs with self aligned fin formation
GLOBALFOUNDRIES INC2 citations61
US9698269B2Jul 4, 2017
Conformal nitridation of one or more fin-type transistor layers
GLOBALFOUNDRIES INC1 citations51
US9209258B2Dec 8, 2015
Depositing an etch stop layer before a dummy cap layer to improve gate performance
GLOBALFOUNDRIES INC0 citations46