Inventor
ERK HENRY F
US21 patents
⚠️ This page may combine multiple inventors who share the name “ERK HENRY F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MEMC ELECTRONIC MATERIALS
14 patentsUS6454635B1Sep 24, 2002
Method and apparatus for a wafer carrier having an insert
MEMC ELECTRONIC MATERIALS58 citations95
US5340437AAug 23, 1994
Process and apparatus for etching semiconductor wafers
MEMC ELECTRONIC MATERIALS88 citations95
US5593505AJan 14, 1997
Method for cleaning semiconductor wafers with sonic energy and passing through a gas-liquid-interface
MEMC ELECTRONIC MATERIALS50 citations94
US6135863AOct 24, 2000
Method of conditioning wafer polishing pads
MEMC ELECTRONIC MATERIALS21 citations91
US5837662ANov 17, 1998
Post-lapping cleaning process for silicon wafers
MEMC ELECTRONIC MATERIALS77 citations90
US5626159AMay 6, 1997
Apparatus for cleaning semiconductor wafers
MEMC ELECTRONIC MATERIALS19 citations90
US6709981B2Mar 23, 2004
Method and apparatus for processing a semiconductor wafer using novel final polishing method
MEMC ELECTRONIC MATERIALS52 citations89
US6376335B1Apr 23, 2002
Semiconductor wafer manufacturing process
MEMC ELECTRONIC MATERIALS48 citations89
US7323421B2Jan 29, 2008
Silicon wafer etching process and composition
MEMC ELECTRONIC MATERIALS26 citations88
US6189546B1Feb 20, 2001
Polishing process for manufacturing dopant-striation-free polished silicon wafers
MEMC ELECTRONIC MATERIALS26 citations88
US6179950B1Jan 30, 2001
Polishing pad and process for forming same
MEMC ELECTRONIC MATERIALS18 citations79
US6600557B1Jul 29, 2003
Method for the detection of processing-induced defects in a silicon wafer
MEMC ELECTRONIC MATERIALS16 citations77
US9011803B2Apr 21, 2015
Systems for producing silane
MEMC ELECTRONIC MATERIALS1 citations63
US7938982B2May 10, 2011
Silicon wafer etching compositions
MEMC ELECTRONIC MATERIALS0 citations51