Inventor
OHISHI SHINJI
JP24 patents
⚠️ This page may combine multiple inventors who share the name “OHISHI SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
18 patentsUS6408045B1Jun 18, 2002
Stage system and exposure apparatus with the same
CANON KK113 citations97
US5684856ANov 4, 1997
Stage device and pattern transfer system using the same
CANON KK133 citations97
US5260580ANov 9, 1993
Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device
CANON KK115 citations97
US5184055AFeb 2, 1993
Device for positioning control
CANON KK84 citations96
US7199493B2Apr 3, 2007
Alignment stage apparatus
CANON KK29 citations92
US7084534B2Aug 1, 2006
Alignment stage apparatus
CANON KK28 citations92
US5666038ASep 9, 1997
Positioning table device including correction of energization electric current to selected coils of a permanent magnet of a drive device
CANON KK41 citations92
US4810941AMar 7, 1989
Control system for a servomotor
CANON KK52 citations92
US6504160B2Jan 7, 2003
Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device
CANON KK20 citations91
US6072183AJun 6, 2000
Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device
CANON KK27 citations91
US7635930B2Dec 22, 2009
Stage apparatus
CANON KK7 citations74
US11058357B2Jul 13, 2021
Acoustic wave apparatus and control method thereof
CANON KK2 citations73
US7259836B2Aug 21, 2007
Stage device for positioning an object, in which a static pressure bearing and a pressurizing magnet suspend a slider
CANON KK4 citations63
US7245092B2Jul 17, 2007
Alignment stage apparatus, exposure apparatus, and semiconductor device manufacturing method
CANON KK3 citations63
US7088429B2Aug 8, 2006
Stage device for positioning an object, in which a static pressure bearing and a pressurizing magnet suspend a slider
CANON KK2 citations63
US11246492B2Feb 15, 2022
Apparatus performing examination utilizing photoacoustic effect, examination support method, and program
CANON KK0 citations52
US8618497B2Dec 31, 2013
Drawing apparatus, method of manufacturing article, and information processing apparatus
CANON KK0 citations51
US7982417B2Jul 19, 2011
Stage unit, exposure apparatus, and device manufacturing method
CANON KK0 citations42