Inventor · disambiguated record
Glenn W. Travis
Also filed as: TRAVIS GLENN · TRAVIS GLENN W
14 granted patents·326 citations·filing 1980–2002
94Inventor score
Top patents by PatentIndex Score
14 records- 0195US6428394B1Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feedLAM RES CORP·Filed 2000·Granted Aug 6, 2002·65 cites·19 claims
- 0294US6261959B1Method and apparatus for chemically-mechanically polishing semiconductor wafersLAM RES CORP·Filed 2000·Granted Jul 17, 2001·58 cites·27 claims
- 0384US6666756B1Wafer carrier head assemblyLAM RES CORP·Filed 2000·Granted Dec 23, 2003·34 cites·21 claims
- 0482US6500056B1Linear reciprocating disposable belt polishing method and apparatusLAM RES CORP·Filed 2000·Granted Dec 31, 2002·22 cites·8 claims
- 0577US6659116B1System for wafer carrier in-process clean and rinseLAM RES CORP·Filed 2002·Granted Dec 9, 2003·20 cites·25 claims
- 0677US6328637B1Method and apparatus for conditioning a polishing pad used in chemical mechanical planarizationLAM RES CORP·Filed 2000·Granted Dec 11, 2001·17 cites·20 claims
- 0776US6746320B2Linear reciprocating disposable belt polishing method and apparatusLAM RES CORP·Filed 2002·Granted Jun 8, 2004·15 cites·6 claims
- 0873US6505636B1Apparatus for wafer carrier in-process clean and rinseLAM RES CORP·Filed 2000·Granted Jan 14, 2003·16 cites·22 claims
- 0973US6086460AMethod and apparatus for conditioning a polishing pad used in chemical mechanical planarizationLAM RES CORP·Filed 1998·Granted Jul 11, 2000·41 cites·30 claims
- 1061US6486550B1Locking mechanism for detachably securing a wafer carrier to a conveyorLAM RES CORP·Filed 2000·Granted Nov 26, 2002·8 cites·28 claims
- 1151US6409051B1Method and apparatus for dispensing a fluid mediaLAM RES CORP·Filed 2000·Granted Jun 25, 2002·6 cites·20 claims
- 1249US6425812B1Polishing head for chemical mechanical polishing using linear planarization technologyLAM RES CORP·Filed 1999·Granted Jul 30, 2002·13 cites·31 claims
- 1339US4306477ATicket dispenserSEW SIMPLE SYSTEMS INC·Filed 1980·Granted Dec 22, 1981·6 cites·7 claims
- 1431US5536294AProcess for extracting precious metals from volcanic oreFiled 1995·Granted Jul 16, 1996·5 cites·1 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →