Inventor
LINEHAN LEO L
US12 patents
⚠️ This page may combine multiple inventors who share the name “LINEHAN LEO L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS5312717AMay 17, 1994
Residue free vertical pattern transfer with top surface imaging resists
IBM78 citations95
US5607824AMar 4, 1997
Antireflective coating for microlithography
IBM61 citations94
US5561194AOct 1, 1996
Photoresist composition including polyalkylmethacrylate co-polymer of polyhydroxystyrene
IBM54 citations92
US5322765AJun 21, 1994
Dry developable photoresist compositions and method for use thereof
IBM47 citations91
US5296332AMar 22, 1994
Crosslinkable aqueous developable photoresist compositions and method for use thereof
IBM49 citations90
US6136498AOct 24, 2000
Polymer-bound sensitizer
IBM19 citations83
US6074800AJun 13, 2000
Photo acid generator compounds, photo resists, and method for improving bias
IBM16 citations81
US6383712B1May 7, 2002
Polymer-bound sensitizer
IBM3 citations62