Inventor · disambiguated record
John Zheng Ye
Also filed as: YE JOHN · YE JOHN Z · YE JOHN ZHENG
9 granted patents·133 citations·filing 2000–2016
88Inventor score
Top patents by PatentIndex Score
9 records- 0194US9412579B2Methods and apparatus for controlling substrate uniformityAPPLIED MATERIALS INC·Filed 2013·Granted Aug 9, 2016·16 cites·15 claims
- 0291US6759665B2Method and system for ion beam containment in an ion beam guideAXCELIS TECH INC·Filed 2001·Granted Jul 6, 2004·34 cites·16 claims
- 0390US10177050B2Methods and apparatus for controlling substrate uniformityAPPLIED MATERIALS INC·Filed 2016·Granted Jan 8, 2019·5 cites·12 claims
- 0485US7507977B2System and method of ion beam control in response to a beam glitchAXCELIS TECH INC·Filed 2006·Granted Mar 24, 2009·10 cites·34 claims
- 0585US6541781B1Waveguide for microwave excitation of plasma in an ion beam guideAXCELIS TECH INC·Filed 2000·Granted Apr 1, 2003·22 cites·25 claims
- 0679US6703628B2Method and system for ion beam containment in an ion beam guideAXCELISS TECHNOLOGIES INC·Filed 2003·Granted Mar 9, 2004·29 cites·36 claims
- 0770US6525326B1System and method for removing particles entrained in an ion beamAXCELIS TECH INC·Filed 2000·Granted Feb 25, 2003·15 cites·27 claims
- 0866US7701230B2Method and system for ion beam profilingAXCELIS TECH INC·Filed 2007·Granted Apr 20, 2010·2 cites·14 claims
- 0951US7557363B2Closed loop dose control for ion implantationAXCELIS TECH INC·Filed 2006·Granted Jul 7, 2009·0 cites·27 claims
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