Inventor
KIRK MICHAEL D
US14 patents
⚠️ This page may combine multiple inventors who share the name “KIRK MICHAEL D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PARK SCIENT INSTR
5 patentsUS5672816ASep 30, 1997
Large stage system for scanning probe microscopes and other instruments
PARK SCIENT INSTR162 citations98
US5376790ADec 27, 1994
Scanning probe microscope
PARK SCIENT INSTR197 citations98
US5157251AOct 20, 1992
Scanning force microscope having aligning and adjusting means
PARK SCIENT INSTR60 citations96
US5811821ASep 22, 1998
Single axis vibration reducing system
PARK SCIENT INSTR64 citations95
USRE35514EMay 20, 1997
Scanning force microscope having aligning and adjusting means
PARK SCIENT INSTR23 citations92
KLA TENCOR CORP
3 patentsKLA TENCOR TECH CORP
2 patentsUS7373277B1May 13, 2008
Methods and systems for detection of selected defects particularly in relatively noisy inspection data
KLA TENCOR TECH CORP26 citations91
US7711521B1May 4, 2010
Methods and systems for detection of selected defects particularly in relatively noisy inspection data
KLA TENCOR TECH CORP3 citations61