Scanning force microscope having aligning and adjusting means

Abstract

A scanning force microscope having a sensor head and a base wherein a moveable sample holder is housed in the base and is positioned relative to a probe housed in the sensor head, such sample being monitored by an optical deflection detection system. The detection system is configured to provide direct visual observation of the probe with respect to the sample. The mirror of the detection system is mounted in a cut away portion of a sphere and defines the axis of rotation of a kinematic mount, such providing ease of fine adjustment of the detection system. The sensor head is in communication with the base by a stage kinematic mount, such providing ease of position adjustment of the sensor head with respect to the base.

We claim: .[.1. A scanning probe microscope apparatus having a sample holder for holding a sample positioned relative to a probe, such positioning being monitored by an optical deflection detection system, comprising: 
     
        wherein said mirror is mounted within said cut away portion..]..[.5.  An apparatus as recited in claim 3 wherein said rotatable holder further comprises: a first element positioned between said base portion and said top portion comprising:   a first arm connected to said rotatable holder;   a second arm connected to said rotatable holder and orthogonal to said first arm; and   wherein positional adjustment of said first element provides rotation of said rotatable holder which defines rotation of said mirror..]..[.6. An apparatus as recited in claim 5 wherein said first arm has a first zone for kinematic mounting and wherein said second arm has a second zone for kinematic mounting..]..[.7. An apparatus as recited in claim 6 further comprising:   a second element incorporated into said apparatus top portion comprising:   first position means for positioning said rotatable holder; and   adjustment means associated with said first contact zone and said second contact zone for adjusting the position of said first element relative to said second element..]..[.8. An apparatus as recited in claim 7 wherein said first position means for positioning said holder is a conical contact zone..]..[.9. An apparatus as recited in claim 7 wherein said adjustment means comprises at least one adjustment screw..]..[.10. An apparatus as recited in claim 1 wherein means for steering an optical beam of said deflection detection system, comprising:   a reflective cantilever including a probe;   a light source which emits light for reflection off said cantilever, said light oblique to said sample holder;   a mirror in the path of said light, directing said light to said cantilever; and   a detector for receiving said light which has been reflected off said cantilever..]..[.11. An apparatus as recited in claim 10 wherein said means for positioning said sample holder relative to said probe comprises a feedback arrangement wherein said detector is a light position sensitive detector which provides feedback information regarding deflection of said probe relative to said sample to a control system, such control system involving a servo loop which adjusts the position of said sample holder relative to said sensor head according to said feedback information..]..[.12. An apparatus as recited in claim 1 wherein said means for adjustably situating said sensor head relative to said base comprises a movable stage..]..[.13. An apparatus as recited in claim 12 wherein said movable stage is a stage kinematic mount to said base..]..[.14. An apparatus as recited in claim 13 wherein said stage kinematic mount comprises:   a third element having a first contact zone, a second contact zone and a third contact zone, each one of said contact zones positioned at one of the corners of a triangle superimposed on said first element, such third element incorporated into said top portion and facing said apparatus base portion; and   a fourth element having approach screws being associated with at least one of said contact zones, such fourth element being incorporated into said apparatus base portion and facing said top portion..]..[.15. An apparatus as recited in claim 14 further comprising second position adjustment means for adjusting the position of said sensor head relative to said base..]..[.16. An apparatus as recited in claim 15 wherein said second position adjustment means comprises screw means incorporated into said sensor head..]..[.17. A scanning probe microscope apparatus having a sample holder positioned relative to a probe, such positioning being monitored by an optical deflection detection device, comprising:   (A) a sensor head including a top portion, such sensor head for housing said probe and said optical deflection detection device;   (B) a base portion for housing said sample holder;   (C) wherein said optical deflection detection system comprises: a reflective cantilever including a probe;   a light source which emits light for reflection off said cantilever;   a mirror in the path of said light, directing said light to said cantilever; and   a detector for receiving said light which has been reflected off said cantilever..]..[.18. An apparatus as recited in claim 17 further comprising means for aligning said optical deflection detection device within said sensor head..]..[.19. An apparatus as recited in claim 17 wherein said means for positioning said sample holder relative to said probe comprises a feedback arrangement wherein said detector is a light position sensitive detector which provides feedback information regarding deflection of said probe relative to said sample to a control system, such control system involving a servo loop which adjusts the position of said sample holder relative to said sensor head according to said feedback information..]..[.20. A scanning probe microscope apparatus having a sample holder positioned relative to a probe, such positioning being monitored by an optical deflection detection device, comprising:     a sensor head having a top portion, such sensor head for housing said probe and said optical deflection detection device and a base portion for housing said sample holder; and   means for aligning said optical deflection detection device within said sensor head which allows an unobstructed view of the vicinity of the sample and the probe from a position above the sample and in a direction approximately perpendicular to the plane of lateral scanning of the sample..]..[.21. An apparatus as recited in claim 20 wherein said means for aligning said optical deflection detection system comprises a mirror in said deflection detection system's optical beam's path..]..[.22. An apparatus as recited in claim 21 wherein said mirror is situated at   
     
     
        approximately the rotational center of a rotatable holder..]..[.23.  An apparatus as recited in claim 22 wherein said rotatable holder is a sphere having a cut away portion and wherein said mirror is mounted within said cut away portion..]..[.24. An apparatus as recited in claim 22 wherein said rotatable holder further comprises: a first element positioned between said base portion and said top portion comprising: a first arm connected to said rotatable holder;   a second arm connected to said rotatable holder and orthogonal to said first arm; and   wherein positional adjustment of said first element provides rotation of said rotatable holder which defines rotation of said mirror..]..[.25. An apparatus as recited in claim 24 wherein said first arm has a first zone for kinematic mounting and wherein said second arm has a second zone for kinematic mounting..]..[.26. An apparatus as recited in claim 25 further comprising:     a second element incorporated into said apparatus top portion comprising: position means for positioning said rotatable holder; and   adjustment means associated with said first contact zone and said second contact zone for adjusting the position of said first element relative to said second element..]..[.27. An apparatus as recited in claim 26 wherein said position means for positioning said holder is a conical contact zone..]..[.28. An apparatus as recited in claim 26 wherein said adjustment means comprises at least one adjustment screw..]..[.29. A scanning probe microscope apparatus having a sample holder positioned relative to a probe, comprising:     a sensor head for housing said probe;   a base portion for housing said sample holder; and   means for adjustably situating said sensor head relative to said base, such means comprising a stage kinematic mount..]..[.30. An apparatus as recited in claim 29 wherein said stage kinematic mount comprises:   a sensor head element incorporated into said sensor head and facing said apparatus base portion, such element having a first contact zone on a moveable first contact portion, a second contact zone on a moveable second contact portion and a third contact zone, each one of said contact zones positioned at one of the corners of a triangle superimposed on said element; and   a base element incorporated into said apparatus base portion and facing said sensor head element, such element having approach screws associated with at least one of said contact zones..]..[.31. An apparatus as recited in claim 30 further comprising position adjustment means for adjusting the position at least one of said moveable contact portions relative to said sensor head..]..[.32. An apparatus as recited in claim 31 wherein said position adjustment means comprises screw means incorporated into said sensor head..]..[.33. An apparatus as recited in claim 30 wherein said first contact zone is a slot and said second contact zone is a   
     
     
        cone..]..Iadd.34.  A scanning probe microscope sensor head comprising: a probe;   a light source;   a detector; and   a mount for removably mounting the sensor head on a base and for adjusting the position of the probe relative to a sample on the base;   the sensor head having a space substantially vertically above the probe, the light source and detector being arranged on the sensor head to enable visual observation of the probe from the space substantially vertically above the probe without removal of the light source or detector. .Iaddend..Iadd.35. A scanning probe microscope sensor head according to claim 34 wherein there are no physical obstructions between the probe and the space that prevent visual observation of the probe from the space substantially vertically above the probe. .Iaddend..Iadd.36. A scanning probe microscope sensor head according to claim 34 wherein the detector is an optical detector. .Iaddend..Iadd.37. A scanning probe microscope sensor head according to claim 34, the sensor head further including a mirror for directing light emitted by the light source to the probe. .Iaddend..Iadd.38. A scanning probe microscope sensor head according to claim 34, the light source being positioned vertically above and to one   
     
     
        side of the probe. .Iaddend..Iadd.39.  A scanning probe microscope sensor head according to claim 38, the sensor head further including a mirror for directing light emitted by the light source to the probe. 
     
     
        .Iaddend..Iadd.  .  A scanning probe microscope sensor head according to claim 38 wherein there are no physical obstructions between the probe and the space that prevent visual observation of the probe from the space 
     
     
        substantially vertically above the probe. .Iaddend..Iadd.41.  A scanning probe microscope according to claim 38, the detector being an optical 
     
     
        detector. .Iaddend..Iadd.42.  A scanning probe microscope sensor head according to claim 34, the sensor head having a U-shaped portion forming a U-shaped opening within which the probe is positioned, the U-shaped opening being oriented such that the U-shaped portion of the sensor head does not block visual observation of the probe along an arc extending from a space substantially vertically above the probe to a position adjacent the U-shaped opening which is at substantially the same vertical level as the probe. .Iaddend..Iadd.43. A scanning probe microscope sensor head according to claim 42, the light source being positioned vertically above 
     
     
        and to one side of the probe. .Iaddend..Iadd.44.  A scanning probe microscope sensor head according to claim 42 wherein there are no physical obstructions between the probe and the space that prevent visual observation of the probe from the space substantially vertically above the 
     
     
        probe. .Iaddend..Iadd.45.  A scanning probe microscope sensor head according to claim 42 wherein the sensor head further includes a mirror for directing light emitted by the light source to the probe. 
     
     
        .Iaddend..Iadd.46.  A scanning probe microscope sensor head according to claim 34 wherein the sensor head mount is a stage kinematic mount. .Iaddend..Iadd.47. A scanning probe microscope sensor head according to claim 46 wherein the stage kinematic mount includes a mounting element on the sensor head and facing the base having a first contact zone on a moveable first contact potion, a second contact zone on a moveable second contact portion and a third contact zone, each one of said contact zones being positioned at one of the corners of a triangle superimposed on the 
     
     
        mounting element. .Iaddend..Iadd.48.  A scanning probe microscope sensor head according to claim 47 wherein the sensor head further includes a position adjustment mechanism for adjusting the position of at least one of the moveable contact portions relative to the sensor head. .Iaddend..Iadd.49. A scanning probe microscope sensor head according to claim 48 wherein the position adjustment mechanism includes a screw incorporated into the sensor head. .Iaddend..Iadd.50. A scanning probe microscope sensor head according to claim 49 wherein the first contact 
     
     
        zone is a slot and the second contact zone is a cone. .Iaddend..Iadd.51. An apparatus as recited in claim 37 wherein said mirror is situated at approximately the rotational center of a rotatable holder. .Iaddend..Iadd.52. An apparatus as recited in claim 51 wherein said rotatable holder is a sphere having a cut away portion and wherein said mirror is mounted within said cut away portion. .Iaddend..Iadd.53. An apparatus as recited in claim 51 wherein said rotatable holder further comprises: a first element positioned between said base portion and said top portion comprising: a first arm connected to said rotatable holder;     a second arm connected to said rotatable holder and orthogonal to said first arm; and   wherein positional adjustment of said first element provides rotation of said rotatable holder which defines rotation of said mirror. .Iaddend..Iadd.54. An apparatus as recited in claim 53 wherein said first arm has a first zone for kinematic mounting and wherein said second arm has a second zone for kinematic mounting. .Iaddend..Iadd.55. An apparatus as recited in claim 54 further comprising:   a second element incorporated into said apparatus top portion comprising:   first position means for positioning said rotatable holder; and adjustment means associated with said first contact zone and said second contact zone for adjusting the position of said first element relative to said second element. .Iaddend..Iadd.56. An apparatus as recited in claim 55 wherein said first position means for positioning said holder is a conical contact zone. .Iaddend..Iadd.57. An apparatus as recited in claim 55 wherein said adjustment means comprises at least one adjustment screw.   
     
     
        .Iaddend..Iadd.  .  A scanning probe microscope comprising: a base for housing a sample; and   a sensor head including a probe, a light source, a detector, and a mount for removably mounting the sensor head on the base and for adjusting the position of the probe relative to the sample;   the sensor head having a space substantially vertically above the probe, the light source and detector being arranged on the sensor head so as to enable visual observation of the probe from the space substantially vertically above the probe without removal of the light source or   
     
     
        detector. .Iaddend..Iadd.59.  A scanning probe microscope according to claim 58 wherein the sensor head further includes a mirror for directing 
     
     
        light emitted by the light source to the probe. .Iaddend..Iadd.60.  An apparatus as recited in claim 59 wherein said mirror is situated at approximately the rotational center of a rotatable holder. .Iaddend..Iadd.61. An apparatus as recited in claim 60 wherein said rotatable holder is a sphere having a cut away portion and wherein said mirror is mounted within said cut away portion. .Iaddend..Iadd.62. An apparatus as recited in claim 60 wherein said rotatable holder further comprises: a first element positioned between said base portion and said top portion comprising: a first arm connected to said rotatable holder;     a second arm connected to said rotatable holder and orthogonal to said first arm; and   wherein positional adjustment of said first element provides rotation of said rotatable holder which defines rotation of said mirror. .Iaddend..Iadd.63. An apparatus as recited in claim 62 wherein said first arm has a first zone for kinematic mounting and wherein said second arm has a second zone for kinematic mounting. .Iaddend..Iadd.64. An apparatus as recited in claim 63 further comprising:   a second element incorporated into said apparatus top portion comprising: position means for positioning said rotatable holder; and     adjustment means associated with said first contact zone and said second contact zone for adjusting the position of said first element relative to said second element. .Iaddend..Iadd.65. An apparatus as recited in claim 64 wherein said position means for positioning said holder is a conical contact zone. .Iaddend..Iadd.66. An apparatus as recited in claim 64 wherein said adjustment means comprises at least one adjustment screw.   
     
     
        .Iaddend..Iadd.67.  A scanning probe microscope according to claim 58, the light source being positioned vertically above and to one side of the probe. .Iaddend..Iadd.68. A scanning probe microscope according to claim 67, the sensor head having a U-shaped portion forming a U-shaped opening within which the probe is positioned, the U-shaped opening being oriented such that the U-shaped portion of the sensor head does not block visual observation of the probe along an arc extending from a space substantially vertically above the probe to a position adjacent the U-shaped opening which is at substantially the same vertical level as the probe. .Iaddend..Iadd.69. A scanning probe microscope according to claim 68, the light source being positioned vertically above and to one side of the 
     
     
        probe. .Iaddend..Iadd.70.  A scanning probe microscope according to claim 68 wherein there are no physical obstructions between the probe and the space that prevent visual observation of the probe from the space 
     
     
        substantially vertically above the probe. .Iaddend..Iadd.71.  A scanning probe microscope according to claim 68 wherein the sensor head further includes a mirror for directing light emitted by the light source to the 
     
     
        probe. .Iaddend..Iadd.72.  A scanning probe microscope according to claim 58, the scanning probe microscope further including a positioning member for positioning the sample holder relative to the probe. 
     
     
        .Iaddend..Iadd.     A scanning probe microscope according to claim 58 wherein there are no physical obstructions between the probe and the space that prevent visual observation of the probe from the space substantially 
     
     
        vertically above the probe. .Iaddend..Iadd.74.  A scanning probe microscope according to claim 58 wherein the sensor head mount is a stage kinematic mount. .Iaddend..Iadd.75. A scanning probe microscope according to claim 74 wherein the stage kinematic mount includes a mounting element on the sensor head and facing the base having a first contact zone on a moveable first contact portion, a second contact zone on a moveable second contact portion and a third contact zone, each one of said contact zones being positioned at one of the corners of a triangle superimposed on the mounting element, and   the base includes a base mounting element facing the sensor head mount and having approach screws associated with at least one of the contact zones. .Iaddend..Iadd.76. A scanning probe microscope according to claim 75 wherein the sensor head further includes a position adjustment mechanism for adjusting the position of at least one of the moveable contact portions relative to the sensor head. .Iaddend..Iadd.77. A scanning probe microscope according to claim 76 wherein the position adjustment mechanism includes a screw incorporated into the sensor head. .Iaddend..Iadd.78. A scanning probe microscope according to claim 77 wherein the first contact zone is a slot and the second contact zone is a cone. .Iaddend..Iadd.79. A scanning probe microscope sensor head comprising:   a probe;   a mount for removably mounting the sensor head on a base and for adjusting the position of the probe relative to a sample on the base; and   a U-shaped portion forming a U-shaped opening within which the probe is positioned, the U-shaped opening being oriented such that the U-shaped portion of the sensor head does not block visual observation of the probe along an arc extending from a space substantially vertically above the probe to a position adjacent the U-shaped opening which is at substantially the same vertical level as the probe. .Iaddend.