Inventor · disambiguated record
Michael D. Kirk
Also filed as: KIRK MICHAEL · KIRK MICHAEL D
23 granted patents·1,003 citations·filing 1991–2019
97Inventor score
Files withKLA TENCOR CORP7PARK SCIENT INSTR7THERMOMICROSCOPES CORP3KIRK MICHAEL D2KLA TENCOR TECH CORP2
Top patents by PatentIndex Score
23 records- 0196US9355440B1Detection of selected defects in relatively noisy inspection dataKLA TENCOR CORP·Filed 2012·Granted May 31, 2016·28 cites·35 claims
- 0296US5376790AScanning probe microscopePARK SCIENT INSTR·Filed 1992·Granted Dec 27, 1994·197 cites·57 claims
- 0392US8422010B2Methods and systems for determining a characteristic of a waferKIRK MICHAEL D·Filed 2012·Granted Apr 16, 2013·13 cites·34 claims
- 0492US5672816ALarge stage system for scanning probe microscopes and other instrumentsPARK SCIENT INSTR·Filed 1995·Granted Sep 30, 1997·162 cites·23 claims
- 0591US10025894B2System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chuckingKLA TENCOR CORP·Filed 2016·Granted Jul 17, 2018·7 cites·19 claims
- 0691US5444244APiezoresistive cantilever with integral tip for scanning probe microscopePARK SCIENT INSTR CORP·Filed 1993·Granted Aug 22, 1995·114 cites·19 claims
- 0790US9430593B2System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chuckingKLA TENCOR CORP·Filed 2013·Granted Aug 30, 2016·10 cites·36 claims
- 0887US8284394B2Methods and systems for determining a characteristic of a waferKIRK MICHAEL D·Filed 2007·Granted Oct 9, 2012·12 cites·36 claims
- 0986US10234402B2Systems and methods for defect material classificationKLA TENCOR CORP·Filed 2017·Granted Mar 19, 2019·5 cites·29 claims
- 1086US5157251AScanning force microscope having aligning and adjusting meansPARK SCIENT INSTR·Filed 1991·Granted Oct 20, 1992·60 cites·33 claims
- 1184US5939719AScanning probe microscope with scan correctionTHERMOMICROSCOPES CORP·Filed 1997·Granted Aug 17, 1999·44 cites·31 claims
- 1284US5496999AScanning probe microscopeFiled 1994·Granted Mar 5, 1996·56 cites·42 claims
- 1382US6310342B1Optical microscope stage for scanning probe microscopeTHERMOMICROSCOPES CORP·Filed 1998·Granted Oct 30, 2001·68 cites·9 claims
- 1481US5811821ASingle axis vibration reducing systemPARK SCIENT INSTR·Filed 1996·Granted Sep 22, 1998·64 cites·22 claims
- 1580US7373277B1Methods and systems for detection of selected defects particularly in relatively noisy inspection dataKLA TENCOR TECH CORP·Filed 2004·Granted May 13, 2008·26 cites·25 claims
- 1675US6057546AKinematically mounted probe holder for scanning probe microscopeTHERMOMICROSCOPES CORP·Filed 1998·Granted May 2, 2000·45 cites·14 claims
- 1774US5854487AScanning probe microscope providing unobstructed top down and bottom up viewsPARK SCIENT INSTR·Filed 1997·Granted Dec 29, 1998·40 cites·48 claims
- 1870US6130427AScanning probe microscope with multimode headPARK SCIENT INSTR·Filed 1997·Granted Oct 10, 2000·24 cites·35 claims
- 1969US7796805B1Defect detectionKLA TENCOR CORP·Filed 2005·Granted Sep 14, 2010·2 cites·16 claims
- 2064US10670537B2Systems and methods for defect material classificationKLA TENCOR CORP·Filed 2019·Granted Jun 2, 2020·0 cites·22 claims
- 2164US7711521B1Methods and systems for detection of selected defects particularly in relatively noisy inspection dataKLA TENCOR TECH CORP·Filed 2008·Granted May 4, 2010·3 cites·29 claims
- 2264USRE35514EScanning force microscope having aligning and adjusting meansPARK SCIENT INSTR·Filed 1994·Granted May 20, 1997·23 cites·1 claims
- 2354US9646379B1Detection of selected defects in relatively noisy inspection dataKLA TENCOR CORP·Filed 2016·Granted May 9, 2017·0 cites·33 claims
Join the waitlist — get patent alerts
Get an alert when Michael D. Kirk files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →