Inventor
OKAYAMA SATOHIRO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “OKAYAMA SATOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CO LTD
3 patentsUS5772770AJun 30, 1998
Substrate processing apparatus
KOKUSAI ELECTRIC CO LTD314 citations96
US6742977B1Jun 1, 2004
Substrate processing device, substrate conveying device, and substrate processing method
KOKUSAI ELECTRIC CO LTD75 citations94
US6485604B1Nov 26, 2002
Substrate processing apparatus
KOKUSAI ELECTRIC CO LTD14 citations75