Inventor · disambiguated record
Kwangyoub Heo
Also filed as: HEO KWANGYOUB
4 granted patents·2 pending applications·10 citations·filing 2018–2020
69Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD6
Top patents by PatentIndex Score
6 records- 0188US11798788B2Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathodeSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Oct 24, 2023·2 cites·20 claims
- 0285US10347468B2Plasma processing system, electron beam generator, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Jul 9, 2019·5 cites·20 claims
- 0375US10950414B2Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Mar 16, 2021·2 cites·14 claims
- 0470US10522332B2Plasma processing system, electron beam generator, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Dec 31, 2019·1 cites·7 claims
- 0549US2019122867A1Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathodeSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
- 0637US2019096636A1Plasma processing apparatus, plasma processing method and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
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