Inventor
NARUSHIMA MASAKI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “NARUSHIMA MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS6951587B1Oct 4, 2005
Ceramic heater system and substrate processing apparatus having the same installed therein
TOKYO ELECTRON LTD600 citations98
US5332442AJul 26, 1994
Surface processing apparatus
TOKYO ELECTRON LTD139 citations97
US7198448B2Apr 3, 2007
Vacuum process system
TOKYO ELECTRON LTD52 citations96
US7090741B2Aug 15, 2006
Semiconductor processing system
TOKYO ELECTRON LTD59 citations96
US7025554B2Apr 11, 2006
Vacuum process system
TOKYO ELECTRON LTD32 citations92
US6802934B2Oct 12, 2004
Processing apparatus
TOKYO ELECTRON LTD33 citations92
US6702865B1Mar 9, 2004
Alignment processing mechanism and semiconductor processing device using it
TOKYO ELECTRON LTD19 citations92
US5065495ANov 19, 1991
Method for holding a plate-like member
TOKYO ELECTRON LTD27 citations91
US4955590ASep 11, 1990
Plate-like member receiving apparatus
TOKYO ELECTRON LTD26 citations91
US4941800AJul 17, 1990
Transfer apparatus for plate-like member
TOKYO ELECTRON LTD4 citations62
US7393172B1Jul 1, 2008
Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device
TOKYO ELECTRON LTD5 citations61