Inventor
LE KENNETH
US9 patents
Patents
9 patentsUS10428807B2Oct 1, 2019
Pump power consumption enhancement
APPLIED MATERIALS INC2 citations71
US11169547B2Nov 9, 2021
Gas-pulsing-based shared precursor distribution system and methods of use
APPLIED MATERIALS INC2 citations70
US11881416B2Jan 23, 2024
Gas delivery system for a shared gas delivery architecture
APPLIED MATERIALS INC2 citations65
US11835974B2Dec 5, 2023
Pressure regulated flow controller
APPLIED MATERIALS INC0 citations61
US10921827B1Feb 16, 2021
Pressure regulated flow controller
APPLIED MATERIALS INC1 citations61
US11520358B2Dec 6, 2022
Gas-pulsing-based shared precursor distribution system and methods of use
APPLIED MATERIALS INC0 citations59
US12031885B2Jul 9, 2024
Leak detection for gas sticks
APPLIED MATERIALS INC1 citations58
US12523380B2Jan 13, 2026
Prevention of contamination of substrates during pressure changes in processing systems
APPLIED MATERIALS INC0 citations54
US11236834B2Feb 1, 2022
Diaphragm valves and methods of operating same
APPLIED MATERIALS INC0 citations44