Inventor · disambiguated record
Ting-Chien Teng
Also filed as: TENG TING-CHIEN
8 granted patents·5 pending applications·155 citations·filing 1998–2020
85Inventor score
Top patents by PatentIndex Score
13 records- 0188US7417714B2Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stageNIKON CORP·Filed 2005·Granted Aug 26, 2008·10 cites·25 claims
- 0285US6130517AMagnetic actuator producing large acceleration on fine stage and low RMS power gainNIKON CORP·Filed 1998·Granted Oct 10, 2000·64 cites·27 claims
- 0385US6069417AStage having paired E/I core actuator controlNIKON CORP·Filed 1998·Granted May 30, 2000·60 cites·12 claims
- 0473US6472777B1Capacitive sensor calibration method and apparatus for opposing electro-magnetic actuatorsNIKON CORP·Filed 2000·Granted Oct 29, 2002·19 cites·24 claims
- 0568US8582080B2Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stageBINNARD MICHAEL·Filed 2008·Granted Nov 12, 2013·2 cites·24 claims
- 0661US11401450B2Fluid synthesis systemNIKON CORP·Filed 2019·Granted Aug 2, 2022·0 cites·12 claims
- 0756US11753914B2Slurry analysis system using flow restrictionNIKON CORP·Filed 2020·Granted Sep 12, 2023·0 cites·15 claims
- 0847US11921025B2Fluid monitoring systemNIKON CORP·Filed 2020·Granted Mar 5, 2024·0 cites·13 claims
- 0939US2007097340A1Active damper with counter mass to compensate for structural vibrations of a lithographic systemNIKON CORP·Filed 2005·Application pending·0 cites
- 1038US2006061751A1Stage assembly including a stage having increased vertical strokeTENG TING-CHIEN·Filed 2004·Application pending·0 cites
- 1137US2003097205A1Control scheme and system for active vibration isolationFiled 2001·Application pending·0 cites
- 1235US2003102722A1Moving magnet type planar motor controlFiled 2001·Application pending·0 cites
- 1335US2002179806A1Adjustable force damper for passive vibration controlFiled 2001·Application pending·0 cites
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