Inventor
SUEMASA SHUICHI
JP6 patents
Patents
6 patentsUS11004701B2May 11, 2021
Break-in apparatus, break-in system and storage media
EBARA CORP0 citations56
US9908212B2Mar 6, 2018
Polishing table replacement apparatus, polishing table replacement method, and apparatus for replacing a component of semiconductor-device manufacturing machine
EBARA CORP1 citations50
US12594583B2Apr 7, 2026
Substrate cleaning device, substrate processing device, and maintenance method for substrate cleaning device
EBARA CORP0 citations48
US11524322B2Dec 13, 2022
Jig for attaching and detaching cleaning member
EBARA CORP0 citations47
US11837482B2Dec 5, 2023
Substrate holding and rotation mechanism and substrate processing apparatus
EBARA CORP0 citations45
US10751761B2Aug 25, 2020
Self-cleaning device and substrate processing apparatus
EBARA CORP0 citations35