Inventor
BUCHWALTER L PAIVIKKI
US6 patents
Patents
6 patentsUS6639488B2Oct 28, 2003
MEMS RF switch with low actuation voltage
IBM75 citations95
US6876282B2Apr 5, 2005
Micro-electro-mechanical RF switch
IBM18 citations92
US7202764B2Apr 10, 2007
Noble metal contacts for micro-electromechanical switches
IBM39 citations91
US7212091B2May 1, 2007
Micro-electro-mechanical RF switch
IBM7 citations73
US7581314B2Sep 1, 2009
Method of forming noble metal contacts
IBM5 citations61
US6372081B1Apr 16, 2002
Process to prevent copper contamination of semiconductor fabs
IBM1 citations51