Inventor
MIYAJIMA YOSHIKAZU
JP51 patents
⚠️ This page may combine multiple inventors who share the name “MIYAJIMA YOSHIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
47 patentsUS6801301B2Oct 5, 2004
Exposure apparatus
CANON KK78 citations98
US6266133B1Jul 24, 2001
Stage device, an exposure apparatus and a device manufacturing method using the same
CANON KK84 citations97
US6320649B1Nov 20, 2001
Stage system for exposure apparatus
CANON KK53 citations95
US7379162B2May 27, 2008
Substrate-holding technique
CANON KK23 citations92
US6583859B2Jun 24, 2003
Stage device, an exposure apparatus and a device manufacturing method using the same
CANON KK35 citations92
US6262794B1Jul 17, 2001
Exposure apparatus and device manufacturing method
CANON KK41 citations92
US7423724B2Sep 9, 2008
Exposure apparatus and device manufacturing method
CANON KK11 citations84
US7345737B2Mar 18, 2008
Exposure method and apparatus having a projection optical system in which a projection gap is filled with liquid
CANON KK13 citations84
US7307698B2Dec 11, 2007
Exposure apparatus and device manufacturing method
CANON KK10 citations84
US7224432B2May 29, 2007
Stage device, exposure apparatus, and device manufacturing method
CANON KK12 citations84
US7196769B2Mar 27, 2007
Exposure apparatus and device manufacturing method
CANON KK10 citations84
US7130016B2Oct 31, 2006
Exposure apparatus and device manufacturing method
CANON KK13 citations84
US7321418B2Jan 22, 2008
Stage apparatus, exposure apparatus, and device manufacturing method
CANON KK11 citations83
US5604719AFeb 18, 1997
Magnetooptical information recording/reproducing method and apparatus employing a floating slider supporting a magnetic head
CANON KK18 citations83
US6836031B2Dec 28, 2004
Linear motor and exposure apparatus using the same
CANON KK18 citations82
US6791670B2Sep 14, 2004
Exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
CANON KK14 citations82
US5379283AJan 3, 1995
Magneto-optical recording/reproducing method with optical head servo inhibited during magnetic head loading
CANON KK19 citations82
US7999919B2Aug 16, 2011
Substrate holding technique
CANON KK5 citations74
US7349063B2Mar 25, 2008
Reflection mirror apparatus, exposure apparatus and device manufacturing method
CANON KK8 citations74
US7236230B2Jun 26, 2007
Exposure apparatus and device fabrication method
CANON KK7 citations74
US7046335B2May 16, 2006
Exposure apparatus and device fabrication method
CANON KK8 citations74
US10406743B2Sep 10, 2019
Imprint apparatus, imprint method, and method of manufacturing article
CANON KK3 citations73
US4843600AJun 27, 1989
Recording head for magneto-optical information recording apparatus
CANON KK10 citations73
US10335984B2Jul 2, 2019
Imprint apparatus and article manufacturing method
CANON KK3 citations72
US7602476B2Oct 13, 2009
Substrate-holding technique
CANON KK4 citations63
US7426013B2Sep 16, 2008
Exposure apparatus and device fabrication method
CANON KK2 citations63
US7315347B2Jan 1, 2008
Exposure apparatus and device manufacturing method
CANON KK4 citations63
US7289194B2Oct 30, 2007
Positioning apparatus, exposure apparatus, and device manufacturing method
CANON KK5 citations63
US7236228B2Jun 26, 2007
Exposure apparatus
CANON KK4 citations63
US7212277B2May 1, 2007
Substrate holding technique
CANON KK3 citations63
US7061580B2Jun 13, 2006
Exposure apparatus and device fabrication method
CANON KK2 citations63
US7312848B2Dec 25, 2007
Positioning apparatus, exposure apparatus, and device manufacturing method
CANON KK5 citations62
US7301602B2Nov 27, 2007
Stage apparatus and exposure apparatus
CANON KK5 citations62
US7253877B2Aug 7, 2007
Exposure apparatus, and device manufacturing method
CANON KK2 citations62
US10406731B2Sep 10, 2019
Application device, imprinting apparatus, and method for manufacturing object
CANON KK0 citations52
US10022900B2Jul 17, 2018
Application device, imprinting apparatus, and method for manufacturing object
CANON KK0 citations52
US9927725B2Mar 27, 2018
Lithography apparatus, lithography method, program, lithography system, and article manufacturing method
CANON KK0 citations52
US9915881B2Mar 13, 2018
Lithography apparatus and article manufacturing method
CANON KK0 citations52
US7408276B2Aug 5, 2008
Plane motor device with surrounding member surrounding coil unit and with cooling channel provided within surrounding member
CANON KK1 citations52
US7391495B2Jun 24, 2008
Stage apparatus, exposure system using the same, and device manufacturing method
CANON KK0 citations52
US7319510B2Jan 15, 2008
Stage device, exposure apparatus using the unit, and device manufacturing method
CANON KK1 citations52
US7253878B2Aug 7, 2007
Exposure apparatus and device fabrication method
CANON KK1 citations52
US10112324B2Oct 30, 2018
Imprint method, imprint apparatus, and production method for article
CANON KK1 citations51
US9952504B2Apr 24, 2018
Imprint method, imprint apparatus, and method for manufacturing device
CANON KK1 citations51
US10197910B2Feb 5, 2019
Imprint apparatus, imprint method, and method of manufacturing article
CANON KK0 citations42
US10409156B2Sep 10, 2019
Mold, imprint apparatus, and method of manufacturing article
CANON KK0 citations41
US10199244B2Feb 5, 2019
Imprint apparatus, and method of manufacturing article
CANON KK0 citations41
HONDA MOTOR CO LTD
1 patentCANON KABUHSIKI KAISHA
1 patentIWATANI SATOSHI
1 patentShowing the top 50 of 51 patents by PatentIndex Score.