Inventor · disambiguated record
Kiyoshi Komiyama
Also filed as: KOMIYAMA KIYOSHI
8 granted patents·376 citations·filing 2000–2007
88Inventor score
Top patents by PatentIndex Score
8 records- 0196US6716477B1Method and apparatus for monitoring process exhaust gas, semiconductor-manufacturing device and method and system for managing semiconductor-manufacturing deviceTOKYO ELECTRON LTD·Filed 2000·Granted Apr 6, 2004·310 cites·19 claims
- 0280US7229843B2Device and method for monitoring process exhaust gas, semiconductor manufacturing device, and system and method for controlling semiconductor manufacturing deviceTOKYO ELECTRON LTD·Filed 2005·Granted Jun 12, 2007·3 cites·19 claims
- 0375US6900439B2Gas leakage detection system, gas leakage detection method and semiconductor manufacturing apparatusTOMOE SHOKAI CO LTD·Filed 2001·Granted May 31, 2005·21 cites·29 claims
- 0469US6582296B2Ventilating method and ventilating system for semiconductor manufacturing apparatusesTOKYO ELECTRON LTD·Filed 2000·Granted Jun 24, 2003·14 cites·8 claims
- 0567US8261762B2Processing gas supplying system and processing gas supplying methodKOMIYAMA KIYOSHI·Filed 2007·Granted Sep 11, 2012·7 cites·22 claims
- 0667US7212977B2Managing apparatus and managing method of a semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted May 1, 2007·13 cites·32 claims
- 0764US6942891B2Device and method for monitoring process exhaust gas, semiconductor manufacturing device, and system and method for controlling semiconductor manufacturing deviceTOKYO ELECTRON LTD·Filed 2004·Granted Sep 13, 2005·5 cites·14 claims
- 0849US6530136B1Method for transporting and installing a semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Mar 11, 2003·3 cites·8 claims
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