Inventor
MIYAJIMA TOSHIHIKO
JP42 patents
⚠️ This page may combine multiple inventors who share the name “MIYAJIMA TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TDK CORP
29 patentsUS5364219ANov 15, 1994
Apparatus for clean transfer of objects
TDK CORP216 citations98
US5139459AAug 18, 1992
Clean transfer method and system therefor
TDK CORP120 citations97
US6641349B1Nov 4, 2003
Clean box, clean transfer method and system
TDK CORP44 citations96
US6199604B1Mar 13, 2001
Clean box, clean transfer method and apparatus therefor
TDK CORP81 citations96
US5730573AMar 24, 1998
Clean transfer method and apparatus therefor
TDK CORP48 citations95
US7654291B2Feb 2, 2010
Purging apparatus and purging method
TDK CORP35 citations93
US7523769B2Apr 28, 2009
Enclosed container lid opening/closing system and enclosed container lid opening/closing method
TDK CORP22 citations93
US6984839B2Jan 10, 2006
Wafer processing apparatus capable of mapping wafers
TDK CORP25 citations92
US6883770B1Apr 26, 2005
Load port mounting mechanism
TDK CORP20 citations92
US6796763B2Sep 28, 2004
Clean box, clean transfer method and system
TDK CORP29 citations92
US6561894B1May 13, 2003
Clean box, clean transfer method and apparatus therefor
TDK CORP21 citations92
US6430802B1Aug 13, 2002
Clean box, clean transfer method and apparatus therefor
TDK CORP52 citations92
US6390145B1May 21, 2002
Container and method for sealing the container
TDK CORP34 citations92
US6168364B1Jan 2, 2001
Vacuum clean box, clean transfer method and apparatus therefor
TDK CORP23 citations92
US6136168AOct 24, 2000
Clean transfer method and apparatus therefor
TDK CORP41 citations92
US7360346B2Apr 22, 2008
Purging system and purging method for the interior of a portable type hermetically sealed container
TDK CORP30 citations91
US7621714B2Nov 24, 2009
Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
TDK CORP11 citations84
US7927058B2Apr 19, 2011
Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port
TDK CORP9 citations83
US7379174B2May 27, 2008
Wafer detecting device
TDK CORP11 citations83
US9536765B2Jan 3, 2017
Load port unit and EFEM system
TDK CORP13 citations82
US7674083B2Mar 9, 2010
Clean device with clean box-opening/closing device
TDK CORP12 citations80
US7360985B2Apr 22, 2008
Wafer processing apparatus including clean box stopping mechanism
TDK CORP8 citations74
US6062808AMay 16, 2000
Clean transfer method and apparatus therefor
TDK CORP7 citations73
US10276415B2Apr 30, 2019
Gas purge unit
TDK CORP2 citations72
US9543177B2Jan 10, 2017
Pod and purge system using the same
TDK CORP3 citations72
US11199528B2Dec 14, 2021
Sensor built-in filter structure and wafer accommodation container
TDK CORP2 citations68
US11521879B2Dec 6, 2022
Load port apparatus, semiconductor manufacturing apparatus, and method of controlling atmosphere in pod
TDK CORP0 citations57
US8029227B2Oct 4, 2011
Dust resistant load port apparatus and mini-environment system
TDK CORP0 citations52
US7748942B2Jul 6, 2010
Dust resistant load port apparatus and mini-environment system
TDK CORP0 citations52
OKABE TSUTOMU
6 patentsUS8522836B2Sep 3, 2013
Substrate storage pod with replacement function of clean gas
OKABE TSUTOMU18 citations84
US8186927B2May 29, 2012
Contained object transfer system
OKABE TSUTOMU20 citations84
US8061738B2Nov 22, 2011
Gas replacement system
OKABE TSUTOMU12 citations84
US8657346B2Feb 25, 2014
Lid opening/closing system for closed container
OKABE TSUTOMU2 citations63
US8322759B2Dec 4, 2012
Closed container and lid opening/closing system therefor
OKABE TSUTOMU4 citations63
US8083456B2Dec 27, 2011
Contained object transfer system
OKABE TSUTOMU1 citations52
IGARASHI HIROSHI
4 patentsUS8876173B2Nov 4, 2014
Substrate storage pod and lid opening/closing system for the same
IGARASHI HIROSHI4 citations73
US8562273B2Oct 22, 2013
Load port apparatus
IGARASHI HIROSHI2 citations63
US8979463B2Mar 17, 2015
Load port apparatus
IGARASHI HIROSHI0 citations42
US8528947B2Sep 10, 2013
Closed container and lid opening/closing system therefor
IGARASHI HIROSHI0 citations42