Inventor
KARAKAWA Takayuki
JP11 patents
Patents
11 patentsUS9478410B2Oct 25, 2016
Method of forming nitride film with plasma
TOKYO ELECTRON LTD13 citations81
US9245741B2Jan 26, 2016
Method for forming nitride film using plasma process
TOKYO ELECTRON LTD15 citations81
US11404265B2Aug 2, 2022
Film deposition method
TOKYO ELECTRON LTD0 citations61
US11201053B2Dec 14, 2021
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations60
US10714332B2Jul 14, 2020
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations60
US10604845B2Mar 31, 2020
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD1 citations60
US11837465B2Dec 5, 2023
Deposition method
TOKYO ELECTRON LTD0 citations51
US11170999B2Nov 9, 2021
Deposition method
TOKYO ELECTRON LTD0 citations51
US9892909B2Feb 13, 2018
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations51
US9922820B2Mar 20, 2018
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations50
US10626496B2Apr 21, 2020
Film forming apparatus, method of cleaning film forming apparatus, and storage medium
TOKYO ELECTRON LTD0 citations41