Inventor
MAEJIMA HISASHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MAEJIMA HISASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
11 patentsUS5025284AJun 18, 1991
Exposure method and exposure apparatus
HITACHI LTD53 citations96
US4699505AOct 13, 1987
Exposure method and exposure apparatus
HITACHI LTD46 citations96
US6174222B1Jan 16, 2001
Process for fabrication of semiconductor device, semiconductor wafer for use in the process and process for the preparation of the wafer
HITACHI LTD56 citations94
US5497331AMar 5, 1996
Semiconductor integrated circuit device fabrication method and its fabrication apparatus
HITACHI LTD46 citations92
US4477182AOct 16, 1984
Pattern exposing apparatus
HITACHI LTD29 citations92
US4783225ANov 8, 1988
Wafer and method of working the same
HITACHI LTD27 citations91
US4544318AOct 1, 1985
Manufacturing system
HITACHI LTD53 citations89
US4974018ANov 27, 1990
Exposure method and exposure apparatus
HITACHI LTD20 citations82
US5279992AJan 18, 1994
Method of producing a wafer having a curved notch
HITACHI LTD18 citations81
US5230747AJul 27, 1993
Wafer having chamfered bend portions in the joint regions between the contour of the wafer and the cut-away portion of the wafer
HITACHI LTD17 citations81
US4218136AAug 19, 1980
Method of and apparatus for aligning photomask
HITACHI LTD12 citations73