Inventor · disambiguated record
Michael P. Karazim
Also filed as: KARAZIM MICHAEL · KARAZIM MICHAEL P
16 granted patents·2 pending applications·139 citations·filing 1982–2025
91Inventor score
Top patents by PatentIndex Score
18 records- 0185US8920564B2Methods and apparatus for thermal based substrate processing with variable temperature capabilityTZU GWO-CHUAN·Filed 2011·Granted Dec 30, 2014·4 cites·12 claims
- 0284US6572708B2Semiconductor wafer support lift-pin assemblyAPPLIED MATERIALS INC·Filed 2001·Granted Jun 3, 2003·27 cites·27 claims
- 0380US9837250B2Hot wall reactor with cooled vacuum containmentAPPLIED MATERIALS INC·Filed 2014·Granted Dec 5, 2017·4 cites·19 claims
- 0479US6958098B2Semiconductor wafer support lift-pin assemblyAPPLIED MATERIALS INC·Filed 2003·Granted Oct 25, 2005·18 cites·20 claims
- 0579US4499691AJet pump beam bolt retainer cutterGEN ELECTRIC·Filed 1982·Granted Feb 19, 1985·42 cites·26 claims
- 0675US9783889B2Apparatus for variable substrate temperature controlTZU GWO-CHUAN·Filed 2012·Granted Oct 10, 2017·1 cites·20 claims
- 0759US6192829B1Antenna coil assemblies for substrate processing chambersAPPLIED MATERIALS INC·Filed 1999·Granted Feb 27, 2001·26 cites·22 claims
- 0857US6648588B2Multiple sided robot blade for semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2002·Granted Nov 18, 2003·6 cites·14 claims
- 0957US2025316454A1Remote plasma sourcesAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1053US10517146B2Internal chamber rotation motor, alternative rotationAPPLIED MATERIALS INC·Filed 2016·Granted Dec 24, 2019·0 cites·19 claims
- 1152US11414740B2Processing system for forming layersAPPLIED MATERIALS INC·Filed 2020·Granted Aug 16, 2022·0 cites·22 claims
- 1252US9394938B2Internal chamber rotation motor, alternative rotationAPPLIED MATERIALS INC·Filed 2013·Granted Jul 19, 2016·0 cites·14 claims
- 1351US11538706B2System and method for aligning a mask with a substrateAPPLIED MATERIALS INC·Filed 2020·Granted Dec 27, 2022·0 cites·20 claims
- 1451US11047039B2Substrate carrier having hard maskAPPLIED MATERIALS INC·Filed 2018·Granted Jun 29, 2021·0 cites·20 claims
- 1550US11637004B2Alignment module with a cleaning chamberAPPLIED MATERIALS INC·Filed 2020·Granted Apr 25, 2023·0 cites·18 claims
- 1650US11469124B2Contactless latch and coupling for vacuum wafer transfer cassetteAPPLIED MATERIALS INC·Filed 2020·Granted Oct 11, 2022·0 cites·20 claims
- 1745US6481951B1Multiple sided robot blade for semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 1999·Granted Nov 19, 2002·11 cites·20 claims
- 1845US2010116823A1Hydroformed fluid channelsAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →