Inventor · disambiguated record
Martinus Arnoldus Henricus Terken
Also filed as: TERKEN MARTINUS ARNOLDUS HENRI · TERKEN MARTINUS ARNOLDUS HENRICUS
7 granted patents·23 citations·filing 2004–2012
79Inventor score
Technology areasG03F
Top patents by PatentIndex Score
7 records- 0172US7012264B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 14, 2006·9 cites·22 claims
- 0269US7184121B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Feb 27, 2007·10 cites·21 claims
- 0367US8134257B2Lithographic apparatus having a lorentz actuator with a composite carrierVOSTERS PETRUS MATHIJS HENRICUS·Filed 2008·Granted Mar 13, 2012·3 cites·28 claims
- 0462US8492935B2Lithographic apparatus having a Lorentz actuator with a composite carrierVOSTERS PETRUS MATHIJS HENRICUS·Filed 2012·Granted Jul 23, 2013·1 cites·18 claims
- 0551US7230254B2Movable carriage for a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jun 12, 2007·0 cites·19 claims
- 0638US7423721B2Lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Sep 9, 2008·0 cites·29 claims
- 0731US7034924B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 25, 2006·0 cites·17 claims
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