Inventor

CHEN KAI-HSIUNG

TW24 patents

⚠️ This page may combine multiple inventors who share the name “CHEN KAI-HSIUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN KAI-HSIUNG

TAIWAN SEMICONDUCTOR MFG CO LTD

Method and system for overlay control

Noise reduction for overlay control

Overlay marks for reducing effect of bottom layer asymmetry

Spectroscopic overlay metrology

Method and apparatus for estimating focus and dose of an exposure process

Method and system for overlay control

Method and system for overlay control

Method and apparatus for extracting systematic defects

Noise reduction for overlay control

Overlay marks for reducing effect of bottom layer asymmetry

Overlay marks for reducing effect of bottom layer asymmetry

Aperture design and methods thereof

Noise reduction for overlay control

Method for forming semiconductor device structure with overlay grating

Aperture design and methods thereof

Method for forming semiconductor device structure with overlay grating

Method for forming semiconductor device structure with overlay grating

Semiconductor metrology target and manufacturing method thereof

Hybrid focus-exposure matrix

TAIWAN SEMICONDUCTOR MFG

Exposure system and method

Method and system for overlay control

CMP process control method

Systems and methods for similarity-based semiconductor process control

Method and apparatus for extracting systematic defects