Inventor · disambiguated record

Andreas Daubenschüz

Also filed as: DAUBENSCHÜZ ANDREAS

0 granted patents·1 pending application·0 citations·filing 2023–2023

Technology areasG01N

Files withZEISS CARL SMT GMBH1

Top patents by PatentIndex Score

1 record

0162US2024198533A1Interchangeable-object holding apparatus for an euv metrology system, method for calibrating such an interchangeable-object holding apparatus and euv metrology system having such an interchangeable-object holding apparatusZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites

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