Inventor · disambiguated record
Aaron Durbin
Also filed as: DURBIN AARON
12 granted patents·6 pending applications·35 citations·filing 2009–2024
87Inventor score
Top patents by PatentIndex Score
18 records- 0193US11028482B2Use of voltage and current measurements to control dual zone ceramic pedestalsLAM RES CORP·Filed 2020·Granted Jun 8, 2021·3 cites·13 claims
- 0290US8405414B2Wafer testing systems and associated methods of use and manufactureDURBIN AARON·Filed 2011·Granted Mar 26, 2013·14 cites·10 claims
- 0386US10633742B2Use of voltage and current measurements to control dual zone ceramic pedestalsLAM RES CORP·Filed 2018·Granted Apr 28, 2020·6 cites·13 claims
- 0486US8872533B2Wafer testing system and associated methods of use and manufactureADVANCED INQUIRY SYSTEMS INC·Filed 2013·Granted Oct 28, 2014·5 cites·11 claims
- 0578US12322617B2Dual zone heaters for metallic pedestalsLAM RES CORP·Filed 2024·Granted Jun 3, 2025·0 cites·12 claims
- 0673US11908715B2Dynamic temperature control of substrate support in substrate processing systemLAM RES CORP·Filed 2019·Granted Feb 20, 2024·1 cites·23 claims
- 0766USD948658SHigh density hole pattern dual plenum hole showerhead assemblyLAM RES CORP·Filed 2020·Granted Apr 12, 2022·5 cites·1 claims
- 0860US10571489B2Wafer testing system and associated methods of use and manufactureTRANSLARITY INC·Filed 2017·Granted Feb 25, 2020·0 cites·17 claims
- 0956US9612259B2Wafer testing system and associated methods of use and manufactureTRANSLARITY INC·Filed 2014·Granted Apr 4, 2017·0 cites·9 claims
- 1056US2023332291A1Remote plasma architecture for true radical processingLAM RES CORP·Filed 2021·Application pending·0 cites
- 1154US2025285858A1Single wafer reactor, low temperature, thermal silicon nitride depositionLAM RES CORP·Filed 2023·Application pending·0 cites
- 1252US2024412953A1Apparatuses and systems for ammonia/chlorine chemistry semiconductor processingLAM RES CORP·Filed 2022·Application pending·0 cites
- 1351US2024387226A1Remote plasma deposition with electrostatic clampingLAM RES CORP·Filed 2022·Application pending·0 cites
- 1450US9146269B2Maintaining a wafer/wafer translator pair in an attached state free of a gasket diposedADVANCED INQUIRY SYSTEMS INC·Filed 2013·Granted Sep 29, 2015·0 cites·23 claims
- 1550US8362797B2Maintaining a wafer/wafer translator pair in an attached state free of a gasket disposed therebetweenADVANCED INQUIRY SYSTEMS INC·Filed 2009·Granted Jan 29, 2013·1 cites·10 claims
- 1650US2023207274A1Photoelectron assisted plasma ignitionLAM RES CORP·Filed 2021·Application pending·0 cites
- 1750US2024234200A1Apparatuses for thermal management of a pedestal and chamberLAM RES CORP·Filed 2022·Application pending·0 cites
- 1846US9176186B2Maintaining a wafer/wafer translator pair in an attached state free of a gasket disposedTRANSLARITY INC·Filed 2013·Granted Nov 3, 2015·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →