Inventor · disambiguated record
Aaron Lynn Routzahn
Also filed as: ROUTZAHN AARON LYNN
1 granted patent·8 pending applications·0 citations·filing 2019–2024
13Inventor score
Files withLAM RES CORP9
Top patents by PatentIndex Score
9 records- 0171US2024387258A1Film stack simplification for high aspect ratio patterning and vertical scalingLAM RES CORP·Filed 2024·Application pending·0 cites
- 0254US12080592B2Film stack simplification for high aspect ratio patterning and vertical scalingLAM RES CORP·Filed 2019·Granted Sep 3, 2024·0 cites·8 claims
- 0353US2024381790A1Techniques and apparatuses for processing chalcogenidesLAM RES CORP·Filed 2022·Application pending·0 cites
- 0451US2025154658A1Atomic layer etching using an inhibitorLAM RES CORP·Filed 2023·Application pending·0 cites
- 0550US2025308894A1Hardmask for high aspect ratio dielectric etch at cryo and elevated temperaturesLAM RES CORP·Filed 2023·Application pending·0 cites
- 0648US2025125155A1Atomic layer etching using boron trichlorideLAM RES CORP·Filed 2022·Application pending·0 cites
- 0746US2023274949A1Etching of indium gallium zinc oxideLAM RES CORP·Filed 2022·Application pending·0 cites
- 0843US2023274939A1Atomic layer etching of a semiconductor, a metal, or a metal oxide with selectivity to a dielectricLAM RES CORP·Filed 2021·Application pending·0 cites
- 0943US2023143057A1Protection of channel layer in three-terminal vertical memory structureLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →