Inventor · disambiguated record
Aart Adrianus Van Beuzekom
Also filed as: VAN BEUZEKOM AART ADRIANUS
6 granted patents·1 pending application·14 citations·filing 2005–2021
74Inventor score
Top patents by PatentIndex Score
7 records- 0190US7724351B2Lithographic apparatus, device manufacturing method and exchangeable optical elementASML NETHERLANDS BV·Filed 2006·Granted May 25, 2010·12 cites·34 claims
- 0268US7576835B2Substrate handler, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Aug 18, 2009·2 cites·19 claims
- 0354US10916453B2Lithographic apparatus, method of transferring a substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Feb 9, 2021·0 cites·20 claims
- 0450US8174680B2Substrate handler, lithographic apparatus and device manufacturing methodVAN DER SCHOOT HARMEN KLAAS·Filed 2009·Granted May 8, 2012·0 cites·21 claims
- 0545US2024019790A1Gripper and lithographic apparatus comprising the gripperASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0643US11226568B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2018·Granted Jan 18, 2022·0 cites·17 claims
- 0743US10409174B2Lithographic apparatus, method of transferring a substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Sep 10, 2019·0 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →