Inventor · disambiguated record
Adam Bateman
Also filed as: BATEMAN ADAM · BATEMAN ADAM PATRICK
2 granted patents·1 pending application·0 citations·filing 2017–2020
21Inventor score
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0141US12094739B2Autoclean for load locks in substrate processing systemsLAM RES CORP·Filed 2020·Granted Sep 17, 2024·0 cites·24 claims
- 0240US2018311707A1In situ clean using high vapor pressure aerosolsLAM RES CORP·Filed 2018·Application pending·0 cites
- 0328US10903065B2Halogen removal module and associated systems and methodsLAM RES CORP·Filed 2017·Granted Jan 26, 2021·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →