Inventor · disambiguated record
Adi Pahima
Also filed as: PAHIMA ADI
5 granted patents·1 pending application·0 citations·filing 2019–2024
60Inventor score
Files withKLA CORP6
Top patents by PatentIndex Score
6 records- 0170US12370581B2In-situ process chamber chuck cleaning by cleaning substrateKLA CORP·Filed 2023·Granted Jul 29, 2025·0 cites·21 claims
- 0257US11774866B2Active reticle carrier for in situ stage correctionKLA CORP·Filed 2021·Granted Oct 3, 2023·0 cites·18 claims
- 0356US12009227B2Electrostatic substrate cleaning system and methodKLA CORP·Filed 2022·Granted Jun 11, 2024·0 cites·20 claims
- 0456US11638938B2In situ process chamber chuck cleaning by cleaning substrateKLA CORP·Filed 2019·Granted May 2, 2023·0 cites·18 claims
- 0552US2025014950A1Mini environment instrumented waferKLA CORP·Filed 2024·Application pending·0 cites
- 0647US11607716B1Systems and methods for chuck cleaningKLA CORP·Filed 2020·Granted Mar 21, 2023·0 cites·39 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →