Inventor · disambiguated record
Adrianus Johannes Hendrikus Schellekens
Also filed as: SCHELLEKENS ADRIANUS JOHANNES HENDRIKUS
4 granted patents·1 pending application·101 citations·filing 2010–2020
76Inventor score
Technology areasG03F
Top patents by PatentIndex Score
5 records- 0197US9081303B2Methods and scatterometers, lithographic systems, and lithographic processing cellsCRAMER HUGO AUGUSTINUS JOSEPH·Filed 2010·Granted Jul 14, 2015·73 cites·24 claims
- 0296US8994944B2Methods and scatterometers, lithographic systems, and lithographic processing cellsASML NETHERLANDS BV·Filed 2014·Granted Mar 31, 2015·24 cites·16 claims
- 0387US10585363B2Alignment systemASML NETHERLANDS BV·Filed 2016·Granted Mar 10, 2020·4 cites·15 claims
- 0446US2022326152A1An improved high harmonic generation apparatusASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 0541US11243470B2Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Feb 8, 2022·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →