Inventor · disambiguated record
Adrian Staicu
Also filed as: STAICU ADRIAN
2 granted patents·1 pending application·4 citations·filing 2011–2015
45Inventor score
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3 records- 0168US8717541B2Field facet mirror for an illumination optics of a projection exposure apparatus for EUV microlithographySTAICU ADRIAN·Filed 2011·Granted May 6, 2014·4 cites·28 claims
- 0252US9304406B2Field facet mirror for an illumination optics of a projection exposure apparatus for EUV microlithographyZEISS CARL SMT GMBH·Filed 2014·Granted Apr 5, 2016·0 cites·20 claims
- 0329US2016077442A1Optical componentZEISS CARL SMT GMBH·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →