Inventor · disambiguated record
Adriana Vintila
Also filed as: VINTILA ADRIANA
4 granted patents·4 pending applications·4 citations·filing 2020–2024
60Inventor score
Technology areasH10P
Files withLAM RES CORP8
Top patents by PatentIndex Score
8 records- 0195US11946142B2Spatially tunable deposition to compensate within wafer differential bowLAM RES CORP·Filed 2020·Granted Apr 2, 2024·4 cites·20 claims
- 0273US12338531B2Spatially tunable deposition to compensate within wafer differential bowLAM RES CORP·Filed 2024·Granted Jun 24, 2025·0 cites·20 claims
- 0365US2025305128A1Multi-zone gas distribution for asymmetric wafer bow compensationLAM RES CORP·Filed 2023·Application pending·0 cites
- 0453US2025118592A1Apparatuses for backside wafer processing with edge-only wafer contactLAM RES CORP·Filed 2023·Application pending·0 cites
- 0551US12410521B2Bidirectional indexing apparatusLAM RES CORP·Filed 2020·Granted Sep 9, 2025·0 cites·14 claims
- 0642US2024213060A1Apparatuses for measuring gap between a substrate support plane and gas distribution deviceLAM RES CORP·Filed 2022·Application pending·0 cites
- 0741US12215804B2Cooling of air actuated valve using actuating airLAM RES CORP·Filed 2020·Granted Feb 4, 2025·0 cites·17 claims
- 0838US2024003010A1Backside deposition and local stress modulation for wafer bow compensationLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →