Inventor · disambiguated record
Aiko Shiga
Also filed as: SHIGA AIKO
39 granted patents·3 pending applications·661 citations·filing 2002–2019
98Inventor score
Top patents by PatentIndex Score
42 records- 0196US6700096B2Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipmentSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Mar 2, 2004·100 cites·32 claims
- 0295US6911358B2Method for manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Jun 28, 2005·63 cites·9 claims
- 0394US6797550B2Semiconductor device and manufacturing method thereforSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Sep 28, 2004·68 cites·14 claims
- 0491US7129121B2Method for manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2005·Granted Oct 31, 2006·13 cites·9 claims
- 0591US7105048B2Laser irradiation apparatusSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Sep 12, 2006·46 cites·64 claims
- 0691US6962860B2Method of manufacturing a semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Nov 8, 2005·53 cites·36 claims
- 0791US6764886B2Manufacturing method of semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Jul 20, 2004·43 cites·14 claims
- 0888US6844523B2Laser apparatus, laser irradiation method, manufacturing method for a semiconductor device, semiconductor device and electronic equipmentSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Jan 18, 2005·36 cites·12 claims
- 0987US7138306B2Laser irradiation method and laser irradiation device and method of manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Nov 21, 2006·23 cites·30 claims
- 1086US7943885B2Laser irradiation method and method of manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2006·Granted May 17, 2011·6 cites·24 claims
- 1185US10366885B2Laser irradiation method and laser irradiation device and method of manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2016·Granted Jul 30, 2019·2 cites·17 claims
- 1285US8686315B2Laser irradiation method and laser irradiation device and method of manufacturing semiconductor deviceTANAKA KOICHIRO·Filed 2006·Granted Apr 1, 2014·6 cites·43 claims
- 1384US7050878B2Semiconductror fabricating apparatusSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted May 23, 2006·25 cites·15 claims
- 1483US7510920B2Manufacturing method for a thin film transistor that uses a pulse oscillation laser crystallize an amorphous semiconductor filmSEMICONDUCTOR ENERGY LAB·Filed 2005·Granted Mar 31, 2009·7 cites·16 claims
- 1583US6979605B2Manufacturing method for a semiconductor device using a marker on an amorphous semiconductor film to selectively crystallize a region with a laser lightSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Dec 27, 2005·24 cites·30 claims
- 1682US7439115B2Semiconductor fabricating apparatusSEMICONDUCTOR ENERGY LAB·Filed 2006·Granted Oct 21, 2008·6 cites·16 claims
- 1781US7217952B2Method of manufacturing a semiconductor device and semiconductor manufacturing apparatusSHARP KK·Filed 2005·Granted May 15, 2007·6 cites·8 claims
- 1881US7135389B2Irradiation method of laser beamSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Nov 14, 2006·23 cites·32 claims
- 1979US9748099B2Laser irradiation method and laser irradiation device and method of manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2013·Granted Aug 29, 2017·2 cites·23 claims
- 2079US7109069B2Semiconductor device and method of manufacturing the sameSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Sep 19, 2006·18 cites·31 claims
- 2178US7319055B2Method of fabricating a semiconductor device utilizing crystallization of semiconductor region with laser beamSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted Jan 15, 2008·16 cites·24 claims
- 2277US7829432B2Method for manufacturing SOI substrateSEMICONDUCTOR ENERGY LAB·Filed 2009·Granted Nov 9, 2010·6 cites·11 claims
- 2376US8696808B2Laser irradiation apparatusYAMAZAKI SHUNPEI·Filed 2006·Granted Apr 15, 2014·4 cites·27 claims
- 2476US7087504B2Method of manufacturing a semiconductor device by irradiating with a laser beamSHARP KK·Filed 2002·Granted Aug 8, 2006·16 cites·9 claims
- 2574US7892952B2Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipmentSEMICONDUCTOR ENERGY LAB·Filed 2005·Granted Feb 22, 2011·3 cites·8 claims
- 2673US8093593B2Semiconductor device having multichannel transistorKOKUBO CHIHO·Filed 2006·Granted Jan 10, 2012·4 cites·14 claims
- 2773US6777713B2Irregular semiconductor film, having ridges of convex portionSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Aug 17, 2004·13 cites·8 claims
- 2870US7635883B2Method for manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2006·Granted Dec 22, 2009·2 cites·19 claims
- 2969US10910219B2Laser irradiation method and laser irradiation device and method of manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2019·Granted Feb 2, 2021·0 cites·2 claims
- 3068US7279372B2Manufacturing method of semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted Oct 9, 2007·8 cites·14 claims
- 3168US6767799B2Laser beam irradiation methodSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Jul 27, 2004·8 cites·40 claims
- 3265US7736917B2Laser beam irradiation method and method of manufacturing a thin firm transistorSEMICONDUCTOR ENERGY LAB·Filed 2007·Granted Jun 15, 2010·1 cites·42 claims
- 3356US7015079B2Semiconductor film, semiconductor device, and method of manufacturing the same including adding metallic element to the amorphous semiconductor film and introducing oxygen after crystallizationSHARP KK·Filed 2004·Granted Mar 21, 2006·4 cites·18 claims
- 3456US2017025546A1Semiconductor device and method of manufacturing the sameSEMICONDUCTOR ENERGY LAB·Filed 2016·Application pending·0 cites
- 3554US8044372B2Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipmentSEMICONDUCTOR ENERGY LAB·Filed 2007·Granted Oct 25, 2011·0 cites·24 claims
- 3654US7670935B2Manufacturing method of semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2006·Granted Mar 2, 2010·0 cites·24 claims
- 3754US7589032B2Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipmentSEMICONDUCTOR ENERGY LAB·Filed 2002·Granted Sep 15, 2009·3 cites·10 claims
- 3852US7037809B2Method of manufacturing semiconductor device using a laser irradiation processSEMICONDUCTOR ENERGY LAB·Filed 2003·Granted May 2, 2006·2 cites·13 claims
- 3950US2012097963A1Semiconductor device and method of manufacturing the sameKOKUBO CHIHO·Filed 2011·Application pending·0 cites
- 4049US7176042B2Laser beam irradiation method that includes determining a thickness of semiconductor prior to crystallizingSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted Feb 13, 2007·1 cites·64 claims
- 4148US8198173B2Method for manufacturing SOI substrateOHNUMA HIDETO·Filed 2010·Granted Jun 12, 2012·0 cites·24 claims
- 4235US2003178682A1Semiconductor device and method of manufacturing the semiconductor deviceFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →