Inventor · disambiguated record
Akira Fukutomi
Also filed as: FUKUTOMI AKIRA
9 granted patents·55 citations·filing 2002–2022
85Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0178US6824616B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2002·Granted Nov 30, 2004·20 cites·12 claims
- 0277US8356951B2Wet-processing apparatusTOKYO ELECTRON LTD·Filed 2011·Granted Jan 22, 2013·5 cites·17 claims
- 0376US9343349B2Substrate holding apparatus and substrate holding methodTOKYO ELECTRON LTD·Filed 2013·Granted May 17, 2016·4 cites·8 claims
- 0475US8997822B2Substrate inverting device, substrate inverting method, and peeling systemIWASHITA YASUHARU·Filed 2012·Granted Apr 7, 2015·5 cites·3 claims
- 0573US6773510B2Substrate processing unitTOKYO ELECTRON LTD·Filed 2002·Granted Aug 10, 2004·17 cites·17 claims
- 0659US12157293B2Separating method, separating apparatus, and separating systemTOKYO ELECTRON LTD·Filed 2022·Granted Dec 3, 2024·0 cites·3 claims
- 0756US7179504B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2004·Granted Feb 20, 2007·4 cites·8 claims
- 0842US9595462B2Peeling systemTOKYO ELECTRON LTD·Filed 2014·Granted Mar 14, 2017·0 cites·10 claims
- 0939US10071544B2Separation apparatus, separation system, and separation methodTOKYO ELECTRON LTD·Filed 2012·Granted Sep 11, 2018·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →