Inventor · disambiguated record
Akira Hamamatsu
Also filed as: HAMAMATSU AKIRA
84 granted patents·8 pending applications·807 citations·filing 1998–2018
99Inventor score
Top patents by PatentIndex Score
92 records- 0197US7664608B2Defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 16, 2010·37 cites·26 claims
- 0297US7528942B2Method and apparatus for detecting defectsHITACHI HIGH TECH CORP·Filed 2006·Granted May 5, 2009·32 cites·8 claims
- 0397US7333192B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 19, 2008·37 cites·20 claims
- 0497US7248352B2Method for inspecting defect and apparatus for inspecting defectHITACHI HIGH TECH CORP·Filed 2003·Granted Jul 24, 2007·66 cites·4 claims
- 0596US7474394B2Apparatus of inspecting defect in semiconductor and method of the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 6, 2009·27 cites·13 claims
- 0695US7369223B2Method of apparatus for detecting particles on a specimenHITACHI HIGH TECH CORP·Filed 2005·Granted May 6, 2008·25 cites·5 claims
- 0795US6797975B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI LTD·Filed 2001·Granted Sep 28, 2004·56 cites·6 claims
- 0894US7061602B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI HIGH TECH CORP·Filed 2005·Granted Jun 13, 2006·18 cites·13 claims
- 0993US7859656B2Defect inspection method and systemHITACHI HIGH TECH CORP·Filed 2009·Granted Dec 28, 2010·15 cites·18 claims
- 1093US7751036B2Apparatus of inspecting defect in semiconductor and method of the sameHITACHI HIGH TECH CORP·Filed 2009·Granted Jul 6, 2010·14 cites·10 claims
- 1193US7315366B2Apparatus and method for inspecting defectsHITACHI LTD·Filed 2007·Granted Jan 1, 2008·17 cites·5 claims
- 1292US8310665B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2012·Granted Nov 13, 2012·9 cites·18 claims
- 1392US8144337B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2009·Granted Mar 27, 2012·15 cites·15 claims
- 1492US8013989B2Defects inspecting apparatus and defects inspecting methodHITACHI HIGH TECH CORP·Filed 2010·Granted Sep 6, 2011·7 cites·16 claims
- 1591US9568439B2Defect inspection device and defect inspection methodHITACHI HIGH TECH CORP·Filed 2016·Granted Feb 14, 2017·3 cites·16 claims
- 1691US7768635B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 3, 2010·10 cites·20 claims
- 1791US7492452B2Defect inspection method and systemHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 17, 2009·13 cites·13 claims
- 1891US7417723B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI LTD·Filed 2006·Granted Aug 26, 2008·10 cites·12 claims
- 1991US7262425B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 28, 2007·13 cites·18 claims
- 2091US6936835B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI LTD·Filed 2002·Granted Aug 30, 2005·34 cites·22 claims
- 2190US8218138B2Apparatus and method for inspecting defectsNAKANO HIROYUKI·Filed 2011·Granted Jul 10, 2012·7 cites·11 claims
- 2290US6888959B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI HIGH TECH ELECT ENG CO·Filed 2001·Granted May 3, 2005·38 cites·20 claims
- 2390US6731384B2Apparatus for detecting foreign particle and defect and the same methodHITACHI LTD·Filed 2001·Granted May 4, 2004·44 cites·18 claims
- 2489US11143600B2Defect inspection deviceHITACHI HIGH TECH CORP·Filed 2018·Granted Oct 12, 2021·6 cites·10 claims
- 2588US9645094B2Defect inspection device and defect inspection methodHITACHI HIGH TECH CORP·Filed 2016·Granted May 9, 2017·2 cites·4 claims
- 2688US7720275B2Method and apparatus for detecting pattern defectsHITACHI HIGH TECH CORP·Filed 2005·Granted May 18, 2010·15 cites·14 claims
- 2787US7417721B2Defect detector and defect detecting methodHITACHI LTD·Filed 2003·Granted Aug 26, 2008·20 cites·21 claims
- 2887US7187438B2Apparatus and method for inspecting defectsHITACHI LTD·Filed 2002·Granted Mar 6, 2007·25 cites·24 claims
- 2986US8660340B2Defect classification method and apparatus, and defect inspection apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted Feb 25, 2014·10 cites·4 claims
- 3086US8274651B2Method of inspecting a semiconductor device and an apparatus thereofHAMAMATSU AKIRA·Filed 2011·Granted Sep 25, 2012·3 cites·14 claims
- 3186US8107065B2Method and apparatus for detecting defectsNAKANO HIROYUKI·Filed 2010·Granted Jan 31, 2012·4 cites·8 claims
- 3286US7115892B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 3, 2006·7 cites·5 claims
- 3385US7643138B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI LTD·Filed 2008·Granted Jan 5, 2010·5 cites·12 claims
- 3485US7511806B2Apparatus and method for inspecting defectsHITACHI LTD·Filed 2007·Granted Mar 31, 2009·7 cites·18 claims
- 3584US8437534B2Defect classification method and apparatus, and defect inspection apparatusSHIBUYA HISAE·Filed 2007·Granted May 7, 2013·18 cites·16 claims
- 3684US7315363B2Inspection method and inspection apparatusHITACHI HIGH TECH CORP·Filed 2003·Granted Jan 1, 2008·14 cites·8 claims
- 3783US7256412B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI HIGH TECH CORP·Filed 2006·Granted Aug 14, 2007·5 cites·6 claims
- 3882US8040503B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI LTD·Filed 2010·Granted Oct 18, 2011·2 cites·12 claims
- 3982US7940385B2Defect inspection apparatus and its methodHITACHI HIGH TECH CORP·Filed 2008·Granted May 10, 2011·5 cites·10 claims
- 4082US7586594B2Method for inspecting defect and apparatus for inspecting defectHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 8, 2009·4 cites·6 claims
- 4181US8638429B2Defect inspecting method and defect inspecting apparatusNAKAO TOSHIYUKI·Filed 2009·Granted Jan 28, 2014·5 cites·16 claims
- 4281US7973920B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2010·Granted Jul 5, 2011·3 cites·19 claims
- 4381US7912276B2Method and apparatus for detecting pattern defectsHITACHI HIGH TECH CORP·Filed 2010·Granted Mar 22, 2011·5 cites·16 claims
- 4480US8654350B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2012·Granted Feb 18, 2014·2 cites·10 claims
- 4580US8508727B2Defects inspecting apparatus and defects inspecting methodUTO SACHIO·Filed 2012·Granted Aug 13, 2013·2 cites·18 claims
- 4680US8355123B2Defect inspection apparatus and its methodHITACHI HIGH TECH CORP·Filed 2012·Granted Jan 15, 2013·2 cites·20 claims
- 4780US7903244B2Method for inspecting defect and apparatus for inspecting defectHITACHI HIGH TECH CORP·Filed 2009·Granted Mar 8, 2011·3 cites·2 claims
- 4879US8831899B2Inspecting apparatus and an inspecting methodNEMOTO KAZUNORI·Filed 2009·Granted Sep 9, 2014·9 cites·30 claims
- 4979US8289507B2Method of apparatus for detecting particles on a specimenHAMAMATSU AKIRA·Filed 2011·Granted Oct 16, 2012·2 cites·12 claims
- 5079US8149396B2Defect inspection apparatus and its methodHAMAMATSU AKIRA·Filed 2011·Granted Apr 3, 2012·2 cites·10 claims
Showing the top 50 of 92 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →